Skip to main content
SpringerLink
Log in

Single-crystalline Tungsten Nanoparticles Produced by Thermal Decomposition of Tungsten Hexacarbonyl

  • Articles
  • Published:
Journal of Materials Research Aims and scope Submit manuscript

Abstract

Nanometer-sized particles of W are of interest in semiconductor device research, where such particles may store electrons inside heteroepitaxially defined structures. In this paper, we present results concerning W particles produced by thermal decomposition of tungsten hexacarbonyl. By the described method, it was possible to produce size-selected, single-crystalline W particles in the size range between 15 and 60 nm. The sintering behavior of the particles was studied between ambient temperatures and 1900 °C. The particle morphology and structure were examined with high-resolution transmission electron microscopy and electron diffraction techniques. Particles sintered at the highest temperatures typically were single crystals, with well-developed facets. Some problems concerning a yield reducing charging mechanism are discussed.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. L.E. Wernersson, A. Litwin, L. Samuelson, and W. Seifert, Jpn. J. Appl. Phys. 36, L1628 (1997).

    Article  CAS  Google Scholar 

  2. Y. Kawakami, T. Seto, and E. Ozawa, J. Jpn. Inst. Metals 63, 1101 (1999).

    Article  CAS  Google Scholar 

  3. A.P. Patokin and V.V. Sagalovich, Russ. J. Phys. Chem. 50, 370 (1976).

    Google Scholar 

  4. G.J. Vogt, J. Vac. Sci. Technol. 20, 1336 (1982).

    Article  CAS  Google Scholar 

  5. M. Diem, M. Fisk, and J. Goldman, Thin Solid Films 107, 39 (1983).

    Article  CAS  Google Scholar 

  6. J. Haigh, G. Burkhardt, and K. Blake, J. Cryst. Growth 155, 3 (1995).

    Article  Google Scholar 

  7. J. Haigh, Chemtronics 1, 134 (1986).

    CAS  Google Scholar 

  8. Y. Nambu, Y. Morishige, and S. Kishida, Appl. Phys. Lett. 56, 2581 (1990).

    Article  CAS  Google Scholar 

  9. F. Okuyama, J. Cryst. Growth 49, 531 (1980).

    Article  CAS  Google Scholar 

  10. P.C. Hoyle, M. Ogasawara, J.R.A. Cleaver, and H. Ahmed, Appl. Phys. Lett. 62, 3043 (1993).

    Article  CAS  Google Scholar 

  11. D. Vollath and D.V. Szabo, Mater. Lett. 35, 3 (1998).

    Article  Google Scholar 

  12. E.O. Knutson and K.T. Whitby, J. Aerosol Sci. 6, 443 (1975).

    Article  Google Scholar 

  13. W. Winklmayer, G.P. Reischl, A.O. Lindner, and A. Berner, J. Aerosol Sci. 22, 289 (1991).

    Article  Google Scholar 

  14. H. Burtscher, L. Scherrer, H.C. Siegmann, A. Schmidt-Ott, and B. Federer, J. Appl. Phys. 53, 3787 (1982).

    Article  CAS  Google Scholar 

  15. K. Deppert, F. Schmidt, T. Krinke, J. Dixkens, and H. Fissan, J. Aerosol Sci. 27, S151 (1996).

    Article  Google Scholar 

  16. G.G. Grau, in Mechanisch-thermische Konstanten für das Gleichgewicht heterogener Systeme, Landolt-Börnstein, edited by K. Schäfer and E. Lax (Springer, Berlin, 1960), Vol. II/2a, p. 45.

    Google Scholar 

  17. CRC Handbook of Chemistry and Physics (CRC Press, Boca Raton, FL, 1997), p. 4–124.

  18. W.C. Hinds, Aerosol Technology: Properties, Behavior, and Measurement of Airborne Particles (Wiley, New York, 1982), p. 424.

    Google Scholar 

  19. A. Schmidt-Ott, J. Aerosol Sci. 19, 553 (1987).

    Article  Google Scholar 

  20. M. Shimada, T. Seto, and K. Okuyama, J. Chem. Eng. Jpn. 27, 795 (1994).

    Article  CAS  Google Scholar 

  21. M.H. Magnusson, K. Deppert, J-O. Malm, J-O. Bovin, and L. Samuelson, J. Nanoparticle Res. 1, 243 (1999).

    Article  CAS  Google Scholar 

  22. S. Basavaiah and S.R. Pollock, J. Appl. Phys. 39, 5548 (1968).

    Article  CAS  Google Scholar 

  23. A. Schmidt-Ott (personal communication).

  24. P. Ahonen and E. Kauppinen (personal communication).

Download references

Author information

Authors and Affiliations

  1. Solid State Physics, Lund University, Box 118, S-221 00, Lund, Sweden

    Martin H. Magnusson & Knut Deppert

  2. Inorganic Chemistry 2, Lund University, Box 124, S-221 00, Lund, Sweden

    Jan-Olle Malm

Authors
  1. Martin H. Magnusson
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Knut Deppert
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Jan-Olle Malm
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Martin H. Magnusson.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Magnusson, M.H., Deppert, K. & Malm, JO. Single-crystalline Tungsten Nanoparticles Produced by Thermal Decomposition of Tungsten Hexacarbonyl. Journal of Materials Research 15, 1564–1569 (2000). https://doi.org/10.1557/JMR.2000.0224

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1557/JMR.2000.0224

Search

Navigation