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Preparation and Characterization of Pb(Zr0.52Ti0.48)O3 Powders and Thin Films by a Sol-gel Route

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Abstract

Lead zirconate titanate [Pb(ZrxTi1−x)O3 (PZT)] powders and ferroelectric thin films with a composition near the morphotropic phase boundary [Pb(Zr0.52Ti0.48)O3] were prepared by a modified sol-gel process using zirconium oxynitrate-2-hydrate as the zirconium source and ethylene glycol as solvent. The precursor solution was prepared from lead acetate-3-hydrate, tetrabutyl titanate, and zirconium oxynitrate-2-hydrate. Perovskite PZT powders were obtained after sintering at 450 °C for 2 h. Films rapid-thermally annealed at 650 °C for 1 min formed well-crystallized perovskite.Microstructures of these films indicated the presence of nano-sized grains (∼50 nm). The remnant polarization was 28.5 μC/cm2, and the coercive field was 39.8 kV/cm. Ferroelectric polarization fatigue test of In/PZT/Pt/Ti/SiO2/Si showed a high fatigue resistance up to 3 × 1010 cycles before Pr decreased by 50%.

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Authors and Affiliations

  1. School of Materials Science and Engineering, Harbin Institute of Technology, P.O. Box 433, Harbin, 150001, People's Republic of China

    Dage Liu, Zhong Wang & Liancheng Zhao

  2. Institute of Chemistry, Chinese Academy of Sciences, P.O. Box 2709, Beijing, 100080, People's Republic of China

    Dage Liu

  3. School of Science, Harbin Institute of Technology, P.O. Box 408, Harbin, 150001, People's Republic of China

    Hongxi Zhang

Authors
  1. Dage Liu
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  2. Hongxi Zhang
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  3. Zhong Wang
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  4. Liancheng Zhao
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Correspondence to Dage Liu.

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Liu, D., Zhang, H., Wang, Z. et al. Preparation and Characterization of Pb(Zr0.52Ti0.48)O3 Powders and Thin Films by a Sol-gel Route. Journal of Materials Research 15, 1336–1341 (2000). https://doi.org/10.1557/JMR.2000.0194

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  • DOI: https://doi.org/10.1557/JMR.2000.0194

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