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Synthesis of nanocrystalline diamond by the direct ion beam deposition method

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Abstract

Nanocrystalline diamond has been synthesized on a mirror-polished Si(001) substrate by means of direct ion beam deposition. Low-energy (80–200 eV) hydrocarbon and hydrogen ions, generated in a Kaufman ion source, were used to bombard the substrates. The bombarded samples were characterized by high-resolution transmission electron microscopy and Raman spectroscopy. Nanocrystalline diamond particles of random orientation were observed in a matrix of amorphous carbon film on the Si(001) substrate. The size of the nanocrystalline diamond particles varied in the range of 50–300 Å. The mechanism of ion-induced formation of nanocrystalline diamond is discussed.

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Authors and Affiliations

  1. Center of Super-Diamond and Advanced Films, Department of Physics & Materials Science, City University of Hong Kong, Hong Kong

    X. S. Sun, N. Wang, W. J. Zhang, H. K. Woo, X. D. Han, I. Bello, C. S. Lee & S. T. Lee

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  1. X. S. Sun
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  2. N. Wang
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  3. W. J. Zhang
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  4. H. K. Woo
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  5. X. D. Han
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  6. I. Bello
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  7. C. S. Lee
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  8. S. T. Lee
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Correspondence to S. T. Lee.

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Sun, X.S., Wang, N., Zhang, W.J. et al. Synthesis of nanocrystalline diamond by the direct ion beam deposition method. Journal of Materials Research 14, 3204–3207 (1999). https://doi.org/10.1557/JMR.1999.0432

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  • DOI: https://doi.org/10.1557/JMR.1999.0432

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