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Preparation of highly oriented Pb(Zr0.52Ti0.48)O3 thin films by sol-gel-hydrothermal process

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Abstract

A novel sol-gel-hydrothermal process for preparation of highly oriented thin films of Pb(Zr0.52Ti0.48)O3 is reported. Pb(Zr0.52Ti0.48)O3 thin films with fully (111) orientation were successfully prepared on platinized silicon substrates at low temperature (100–200 °C) by combining a conventional sol-gel process and hydrothermal method, i.e., sol-gel-hydrothermal technique. The x-ray rocking curve for the (111) reflection as measured by a high-resolution four-crystal diffractrometer showed a narrow full width at half-maximum value of 0.20° for the as-prepared films. A dense, pinhole-free, and uniform surface morphology was observed from atomic force microscopy images of the films. The low leakage current density of the prepared films was also found.

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Authors and Affiliations

  1. National Laboratory of Functional Materials for Informatics, Shanghai Institute of Metallurgy, Chinese Academy of Sciences, 865 Changning Road, Shanghai, 200050, People’s Republic of China

    Jianming Zeng & Chenglu Lin

  2. Department of Applied Chemistry, Jiangsu Institute of Petrochemical Technology, Changzhou, 213016, People’s Republic of China

    Jinhua Li & Kun Li

Authors
  1. Jianming Zeng
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  2. Chenglu Lin
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  3. Jinhua Li
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  4. Kun Li
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Correspondence to Jianming Zeng.

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Zeng, J., Lin, C., Li, J. et al. Preparation of highly oriented Pb(Zr0.52Ti0.48)O3 thin films by sol-gel-hydrothermal process. Journal of Materials Research 14, 2712–2715 (1999). https://doi.org/10.1557/JMR.1999.0364

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  • DOI: https://doi.org/10.1557/JMR.1999.0364

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