Abstract
Diamond films have been grown by hot filament chemical vapor deposition (CVD) on mirror-polished positively biased Si substrates. Very smooth films a few micrometers thick were obtained in only 30 min. SEM, x-ray diffraction patterns, and Raman were used to characterize the films. Not only diamond but other carbon phases, were also detected. The initial structure showed a high density of defects and large stresses. Structural changes in time were found to occur with films apparently undergoing a phase transformation.
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Popovici, G., Chao, C.H., Prelas, M.A. et al. Smooth diamond films grown by hot filament chemical vapor deposition on positively biased silicon substrates. Journal of Materials Research 10, 2011–2016 (1995). https://doi.org/10.1557/JMR.1995.2011
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DOI: https://doi.org/10.1557/JMR.1995.2011