Abstract
The electrolysis treatment of the hydrothermal-electrochemical method has been modified so that it permits SrTiO3 thin films to be grown on Ti electrodes being oxidized anodically in Sr(OH)2 solutions far beyond a thickness limit of several tens of nanometers hitherto attained. The relation between the total current passed through the Ti anode and the amount of the resulting SrTiO3 film was analyzed on the basis of a reaction model that interprets the anodic current to be compensated with electrons generated partly by oxidation of Ti and partly by decomposition of H2O. Current efficiency for the film growth was estimated to be in the range from 0.8 to 3% depending on the Ti electrode potential.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
S.E. Yoo, N. Ishizawa, M. Hayashi, and M. Yoshimura, Report of The Research Laboratory of Engineering Materials of Tokyo Institute Technology, No. 16 (1991), p. 39.
M. Yoshimura, S.E. Yoo, M. Hayashi, and N. Ishizawa, Jpn. J. Appl. Phys. 28, L2007 (1989).
M. Yoshimura, S.E. Yoo, M. Hayashi, and N. Ishizawa, in Ceramic Transactions, Vol. 15, Microelectronic Systems, edited by K. M. Nair, R. Pohanka, and R. C. Buchanan (The American Ceramic Society, Westerville, OH, 1990), pp. 427–436.
N. Ishizawa, S.E. Yoo, M. Hayashi, and M. Yoshimura, in Ferroelectric Thin Films, edited by E. R. Myers and A. I. Kingon (Mater. Res. Soc. Symp. Proc. 200, Pittsburgh, PA, 1990), pp. 57–62.
S.E. Yoo, M. Hayashi, N. Ishizawa, and M. Yoshimura, J. Am. Ceram. Soc. 73, 2561 (1990).
Y. Sakabe, Y. Hamaji, M. Hayashi, Y. Ogino, N. Ishizawa, and M. Yoshimura, in Proceedings of The Fifth U.S. -Japan Seminar on Dielectric and Piezoelectric Ceramics, Kyoto, Japan (1990), pp. 300–303.
K. Tachibana, Boshoku Gijutsu 34, 125 (1985).
D. D. Macdonald, A. C. Scott, and P. Wentrcek, J. Electrochem. Soc. 126, 908 (1979).
D. D. Macdonald, A. C. Scott, and P. Wentrcek, J. Electrochem. Soc. 126, 1618 (1979).
R.S. Greeley, W.T. Smith, Jr., R.W. Stoughton, and M.H. Lietzke, J. Phys. Chem. 64, 652 (1960).
R.S. Greeley, W.T. Smith, Jr., M.H. Lietzke, and R.W. Stoughton, J. Phys. Chem. 64, 1445 (1960).
K. Sugimoto and S. Soma, Boshoku Gijutsu 31, 574 (1982).
D. Briggs and J. C. Riviere, in Practical Surface Analysis, Vol. 1, Auger and X-ray Photoelectron Spectroscopy, edited by D. Briggs and M.P. Seah, 2nd ed. (John Wiley & Sons, Sussex, England, 1983), Chap. 3, pp. 85–141.
Powder Diffraction File, No. 35-734 (Joint Committee on Powder Diffraction Standards, International Center for Diffraction Data, Swarthmore, PA, 1985).
M. Drys and W. Trzebiatowski, in Phase Diagrams for Ceramists, edited by E. M. Levin, C. R. Robbins, and H. F. McMurdie (The American Ceramic Society, Westerville, OH, 1964), Vol. I, Fig. 297.
A. Cocco and F. Massazza, in Phase Diagrams for Ceramists, edited by E. M. Levin, C. R. Robbins, and H. F. McMurdie (The American Ceramic Society, Westerville, OH, 1969), Vol. 1969 Supplement, Fig. 2334.
K. Kajiyoshi, K. Tomono, Y. Hamaji, T. Kasanami, and M. Yoshimura, unpublished.
A.J. Bard and L. R. Faulkner, Electrochemical Methods—Fundamentals and Applications (John Wiley & Sons, New York, 1980), pp. 699–700.
CRC Handbook of Chemistry and Physics, edited by R. C. Weast, 70th ed. (CRC Press, Boca Raton, FL, 1989), pp. D-274–275.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Kajiyoshi, K., Tomono, K., Hamaji, Y. et al. Contribution of electrolysis current to growth of SrTiO3 thin film by the hydrothermal-electrochemical method. Journal of Materials Research 9, 2109–2117 (1994). https://doi.org/10.1557/JMR.1994.2109
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1557/JMR.1994.2109