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Effects of oxygen ion energy on the growth of CuO films by molecular beam epitaxy using mass-separated low-energy O+ beams

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Abstract

We have studied the effects of the kinetic energy of mass-separated O+ beams on the growth of CuO thin films deposited on unheated MgO(001) and at 510 °C, in energy ranging from 10 to 200 eV by x-ray photoemission spectroscopy, x-ray diffraction, reflection high-energy electron diffraction, and scanning electron microscopy. The films deposited at 510 °C show a full width at the half maximum (FWHM) of 0.06°for the rocking curve through the (111) peak, regardless of the kinetic energy of oxygen ions. CuO has been epitaxially grown on MgO(001) without heating it in a vacuum of 4 × 10−7 Pa. The x-ray diffraction intensity of the CuO(111) increases with an increase in the kinetic energy of O+, and its FWHM approaches that of the CuO film grown at 510 °C. The surface morphology is improved for the films deposited on unheated substrates.

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References

  1. R. Kita, T. Hase, R. Itti, M. Sasaki, T. Morishita, and S. Tanaka, Appl. Phys. Lett. 60, 2684 (1992).

    Article  CAS  Google Scholar 

  2. R. Kita, T. Hase, H. Takahashi, K. Kawaguchi, and T. Morishita, J. Mater. Res. 8, 321 (1993).

    Article  CAS  Google Scholar 

  3. I. Yamada, H. Inokawa, and T. Takagi, Nucl. Instrum. Methods Phys. Res. B 6, 439 (1985).

    Article  Google Scholar 

  4. T. Takagi, Thin Solid Films 92, 1 (1982).

    Article  CAS  Google Scholar 

  5. R. E. Bunsha, Thin Solid Films 80, 255 (1981).

    Article  Google Scholar 

  6. E. H. Hirsh and I. K. Varga, Thin Solid Films 52, 445 (1978).

    Article  Google Scholar 

  7. B. D. Cullity, Elements of X-Ray Diffraction (Addison-Wesley, Reading, MA, 1977), 2nd ed., Eqs. (3)–(13).

    Google Scholar 

  8. M-A. Hansan, S. A. Barneil, J-E. Sundgren, and J. E. Greene, J. Vac. Sci. Technol. A 5, 1963 (1987).

    Google Scholar 

  9. S. Shimizu, N. Sasaki, S. Ogata, O. Tsukakoshi, S. Seki, and H. Yamakawa, in Low Energy Ion Beam and Plasma Modification of Materials, edited by J. M. E. Harper, K. Miyake, J. R. McNeil, and S. M. Gorbatkin (Mater. Res. Soc. Symp. Proc. 223, Pittsburgh, PA, 1991), p. 347.

  10. M. Marinov, Thin Solid Films 46, 267 (1977).

    Article  CAS  Google Scholar 

  11. I. Yamada, L. L. Levenson, H. Usui, and T. Takagi, in Materials Modification and Growth Using Ion Beams, edited by U. Gibson, A. E. White, and P. P. Pranko (Mater. Res. Soc. Symp. Proc. 93, Pittsburgh, PA, 1987), p. 253.

  12. P. Rabinzohn, G. Gautherin, B. Agius, and C. Cohen, J. Electrochem. Soc. 131, 905 (1984).

    Article  CAS  Google Scholar 

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Author notes

  1. Takashi Hase

    Present address: Present address: Superconducting and Cryogenic Technology Center, Kobe Steel Ltd., 1-5-5 Takatsukadai, Nishi-ku, Kobe, 655-11, Hyogo, Japan

  2. Takeshi Koga

    Present address: Present address: Showa Electric Wire and Cable Co., Ltd., 2-2-1 Odasakae, Kawasaki-ku, Kawasaki, 210, Kanagawa, Japan

Authors and Affiliations

  1. Superconductivity Research Laboratory, International Superconductivity Technology Center, Tokyo, 1-10-13 Shinonome, 135, Koto-ku, Japan

    Ryusuke Kita, Kenichi Kawaguchi, Takashi Hase, Rittaporn Itti & Tadataka Morishita

  2. Showa Electric Wire and Cable Co., Ltd., Kanagawa, 2-2-1 Odasakae, Kawasaki-ku, 210, Kawasaki, Japan

    Takeshi Koga

Authors
  1. Ryusuke Kita
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  2. Kenichi Kawaguchi
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  3. Takashi Hase
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  4. Takeshi Koga
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  5. Rittaporn Itti
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  6. Tadataka Morishita
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Kita, R., Kawaguchi, K., Hase, T. et al. Effects of oxygen ion energy on the growth of CuO films by molecular beam epitaxy using mass-separated low-energy O+ beams. Journal of Materials Research 9, 1280–1283 (1994). https://doi.org/10.1557/JMR.1994.1280

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  • DOI: https://doi.org/10.1557/JMR.1994.1280

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