Abstract
Co/Cu superlattices with total thicknesses ranging from 10 nm to 60 nm and with periodicities of 1.6–8.5 nm were sputtered on single-crystalline sapphire (1120)-substrates. Sputtering with low rates at room temperature yields samples of high epitaxial and crystalline quality. By careful choice of the sputtering parameters, either the fee [100] or the fcc [111] orientation can be selected as growth direction on one and the same substrate orientation. The preference for a particular film orientation appears to be kinetically driven. In all cases, the average lattice spacings d and the appearance of satellite reflections in x-ray Bragg-scans point to coherent growth up to thicknesses of 30 nm. X-ray small angle reflectivity measurements reveal clear oscillations and satellites indicative for smooth interfaces. Scanning electron microscope (SEM) and transmission electron microscope (TEM) observations supplement the characterization of the films.
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B.Y. Jin and J.B. Ketterson, Adv. Phys. 38, 191 (1989).
E.G. Bauer, B.W. Dodson, D.J. Ehrlich, L.C. Feldman, C. P. Flynn, M. W. Geis, J. P. Harbison, R. J. Matyi, P. S. Peercy, P. M. Petroff, J. M. Phillips, G. B. Stringfellow, and A. Zangwill, J. Mater. Res. 5, 852 (1990).
C. F. Majkrzak, J. Kwo, M. Hong, Y. Yafet, D. Gibbs, C. L. Chien, and J. Bohr, Adv. Phys. 40, 99 (1991).
See, for example, the conference proceedings, Int. Conf. on Magnetism, edited by S.B. Palmer, J. Magn. Magn. Mater. 104–107 (1993).
S. S. P. Parkin, R. Bhadra, and K. P. Roche, Phys. Rev. Lett. 66, 2152 (1991); S.S.P. Parkin, R.F. Marks, R.F.C. Farrow, G. R. Harp, Q. H. Lam, and R. J. Savoy, Phys. Rev. B 46, 9262 (1992).
M.T. Johnson, R. Coehoorn, J.J. de Vries, N.W.E. McGee, J. aan de Stegge, and P.J.H. Bloemen, Phys. Rev. Lett. 69, 969 (1992); M.T. Johnson, S.T. Purcell, N.W.E. McGee, R. Coehoorn, J. aan de Stegge, and W. Hoving, Phys. Rev. Lett. 68, 688 (1992).
A. Schreyer, K. Bröhl, J. F. Ankner, Th. Zeidler, P. Bödeker, N. Metoki, C. F. Majkrzak, and H. Zabel, Phys. Rev. B 47, 15334 (1993).
W. F. Egelhoff, Jr. and M.T. Kief, Phys. Rev. B. 45, 7795 (1992).
A. Schreyer, Th. Zeidler, Ch. Morawe, N. Metoki, H. Zabel, J.F. Ankner, and C.F. Majkrzak, J. Appl. Phys. 73, 7616 (1993).
Ch. Morawe, A. Stierle, N. Metoki, and H. Zabel, J. Magn. Magn. Mater. 102, 223 (1991).
M. K. Meyer, I. K. Schuller, and Ch. M. Falco, J. Appl. Phys. 52, 5803 (1981); L. Eckertova, Physics of Thin Films (Plenum Press, New York, 1977); M. H. Francombe, Growth of Epitaxial Films by Sputtering in Epitaxial Growth part A, edited by J. W. Matthews (Academic Press, New York, 1975).
S. Durbin, J.E. Cunningham, M.E. Mochel, and C.P. Flynn, J. Phys. F 11, L223 (1981); S. Durbin, J.E. Cunningham, and C.P. Flynn, J. Phys. F 12, L75 (1982).
P.F. Miceli, C.J. Palmström, and K.W. Moyers, Appl. Phys. Lett. 58, 1602 (1991).
A. Stierle, P. Bödeker, A. Abromeit, K. Bröhl, and H. Zabel, J. Appl. Phys. 73 (1993).
P. Bödeker, A. Abromeit, K. Bröhl, P. Sonntag, N. Metoki, and H. Zabel, Phys. Rev. B 47, 2353 (1993).
P.M. Reimer, H. Zabel, C.P. Flynn, and J.A. Dura, Phys. Rev. B 45, 11426 (1992).
Landolt-Börnstein, New Series, Group 3 (Springer, Berlin, 1984), Vol. 11 (18).
J.A. Nielsen, Structure and Dynamics of Surfaces II: Phenomena, Models, and Methods, Topics in Current Physics, edited by W. Schommers and P. Blanckenhagen (Springer-Verlag, Berlin, 1987), Vol. 43.
H. Dosch, Critical Phenomena at Surfaces and Interfaces, Springer Tracts in Modern Physics (Springer-Verlag, Berlin, 1992), Vol. 126.
N. Metoki, Th. Zeidler, A. Stierle, K. Bröhl, and H. Zabel, J. Magn. Magn. Mater. 118, 57 (1993).
Surface X-Ray and Neutron Scattering, Springer Proceedings in Physics, edited by H. Zabel and I. K. Robinson (Springer-Verlag, Berlin, Heidelberg, 1992), Vol. 61.
H. Zabel, X-Ray and Neutron Scattering at Thin Films, Festkörperprobleme/Advances in Solid State Physics 30, 197, Vieweg (1990).
B. E. Warren, X-Ray Diffraction (Dover Publications, New York, 1990).
H. Nagata and S. Seki, Jpn. J. Appl. Phys. 29, 569 (1990).
L. G. Parratt, Phys. Rev. 95, 359 (1954); L. Nevot and P. Groce, Rev. Phys. Appl. 15, 761 (1980).
P. Bödeker, private communication.
R. Hull and J. C. Bean, Critical Rev. Solid St. Mater. Sci. 17, 507 (1992).
L. S. Yu, J. M. E. Harper, J. J. Cuomo, and D. A. Smith, J. Vac. Sci. Technol. A 4, 443 (1986).
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Morawe, C., Abromeit, A., Metoki, N. et al. Epitaxial growth of Co/Cu[100] and [111] superlattices via rf sputtering on sapphire (1120)-substrates. Journal of Materials Research 9, 570–581 (1994). https://doi.org/10.1557/JMR.1994.0570
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DOI: https://doi.org/10.1557/JMR.1994.0570