Abstract
Scandium aluminum nitride (ScAlN) alloy thin films were deposited on (100) silicon substrates by DC reactive magnetron sputtering method using a scandium aluminum alloy (Sc0.06Al0.94) target. The influences of N2/Ar-flow ratio, substrate temperature, sputtering power and sputtering pressure on the film’s crystal orientation and surface morphology were investigated systematically. The c-axis preferred orientation degree changes obviously, firstly increasing to the maximum and then decreasing, with increasing each of the sputtering parameters. Meanwhile, the surface morphology of ScAlN films performs a similar variation. Then, the relationship between the crystal orientation and piezoelectric response is determined. Finally, it is demonstrated that highly c-axis oriented ScAlN thin films, with FWHM value of the rocking curve of 2.9°, RMS roughness of 2.612 nm and piezoelectric constant d33 of 8.9 pC/N, can be obtained with a N2/Ar-flow ratio of 3.3:7, a substrate temperature of 650 °C, a sputtering power of 130 W and a sputtering pressure of 0.5 Pa.
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This article is supported by project supported by the Fundamental Research Funds for the Central Universities of Ministry of Education of China.
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Zhang, Y., Zhu, W., Zhou, D. et al. The preparation of ScAlN(002) alloy thin films deposited on Si(100) substrates by DC reactive magnetron sputtering. J Mater Sci: Mater Electron 26, 2151–2160 (2015). https://doi.org/10.1007/s10854-014-2661-0
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DOI: https://doi.org/10.1007/s10854-014-2661-0