Abstract
Solid solutions of aluminum nitride (AlN) and silicon carbide (SiC), the only intermediate phases in their respective binary systems, have been grown at 1050 °C on α(6H)-SiC(0001) substrates cut 3–4° off-axis toward [11$\overline 1$0] using plasma-assisted, gas-source molecular beam epitaxy. A film having the approximate composition of (AlN)0.3(SiC)0.7, as determined by Auger spectrometry, was selected for additional study and is the focus of this note. High resolution transmission electron microscopy (HRTEM) revealed that the film was monocrystalline with the wurtzite (2H) crystal structure.
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References
G.R. Fisher and P. Barnes. Philos, Mag. B 61. 217 (1990).
Z. Sitar. M.J. Paisley, and R.F. Davis. Annual Progress Report. ONR Contract N00014-86-K-0686, June 1, 1989.
S. Strite and H. Makoç, private communication.
G.A. Slack. J. Phys. Them. Solids 34, 321 (1973).
W. M. Yim, E.J. Stofko, P.J. Zanzucci. J.I. Pankove, M. Ettenbcrg. and S. L. Gilbert, J. Appl. Phys. 44, 292 (1973).
C. Matignon, C. R. Acad. Sci. 178, 1615 (1924).
W. Rataniello. K. Cho. and A V. Vikar. J. Mater. Sci. 16, 3479 (1981).
W. Rafanicllo, M.R. Plinchta, and A. V. Vikar, J. Am. Ccram. Soc. 66, 272 (1983).
R. Ruh and A. Zangvil. J. Am. Ceram. Soc. 65, 260 (1982).
A. Zangvil and R. Ruh. Mater. Sci. Eng. 71, 159 (1985).
A. Zangvil and R. Ruh. J. Am. Ceram. Soc. 71, 884 (1988).
A. Zangvil and R. Ruh, in Silicon Carbide ‘87 (The American Ceramic Society, Westerville, OH. 1989), pp. 63–82.
S. Kuo and A. V. Vikar, J. Am. Ccram. Soc. 73, 2460 (1990).
C. L. Czckaj, M. L.J. Hackney, W. J. Hurley, Jr., L. V. Interrante, G. A. Sigel, PJ. Schields, and G. A. Slack, J. Am. Ccram. Soc. 73, 352 (1990).
Sh. A. Nurmagomedov, A.N. Pitkin, V.N. Razbegaev, G. K. Safaralicv, Yu. M. Tairov, and V. F. Tsvetkov, Sov. Phys. Semicond. 23, 100 (1989).
I. Jenkins, K. G. Irvine, M. G. Spencer, V. Dmitriev, and N. Chen (in press).
L. B. Rowland, S. Tanaka, R.S. Kern, and R. F. Davis, in Proceedings of the Fourth International Conference on Amorphous and Crystalline Silicon Carbide (Springer-Verlag, Berlin, 1992), in press.
A. Zalar, Thin Solid Films 124, 223 (1985).
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Kern, R.S., Rowland, L.B., Tanaka, S. et al. Solid solutions of AlN and SiC grown by plasma-assisted, gas-source molecular beam epitaxy. Journal of Materials Research 8, 1477–1480 (1993). https://doi.org/10.1557/JMR.1993.1477
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DOI: https://doi.org/10.1557/JMR.1993.1477