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Indium tin oxide thin films prepared by thermal decomposition of ethylene glycol solution

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Abstract

Indium tin oxide (ITO) films were prepared on a glass substrate by thermal decomposition of ethylene glycol (EG) solutions which were prepared by dissolving indium and tin chlorides into ethylene glycol and then heating the solution at 200 °C. Homogeneous ITO film with a thickness of 1 μm without any cracks was obtained from the EG solution with a viscosity of about 50 cSt by spin coating, with the rotation of the substrate at 2000 rpm. The crystallization of the film thus obtained occurred above 400 °C. A well-crystallized ITO film was obtained by heat-treating at 600 °C. The resistivity of the ITO film obtained on a glass substrate showed a minimum value of 1.1 × 10−4 ohm cm at about 7 at.% Sn.

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Authors and Affiliations

  1. Department of Chemical Technology, Kanagawa Institute of Technology, 243-02, 1030 Shimo-ogino, Atsugi-shi, Japan

    Osamu Yamamoto & Tadashi Sasamoto

  2. Department of Applied Chemistry, Faculty of Engineering, Hokkaido University, Kita-Ku, Sapporo, 060, Japan

    Michio Inagaki

Authors
  1. Osamu Yamamoto
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  2. Tadashi Sasamoto
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  3. Michio Inagaki
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Yamamoto, O., Sasamoto, T. & Inagaki, M. Indium tin oxide thin films prepared by thermal decomposition of ethylene glycol solution. Journal of Materials Research 7, 2488–2491 (1992). https://doi.org/10.1557/JMR.1992.2488

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  • DOI: https://doi.org/10.1557/JMR.1992.2488

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