Abstract
Scanning electron micrographs of indents in (111) silicon reveal that a thin layer of material immediately adjacent to the indenter is plastically extruded. The fact that the material can be deformed in this way indicates that it has metallic-like mechanical properties. This is presented as new evidence that a pressure-induced phase transformation to the metallic state occurs during the indentation of silicon.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
I.V. Gridneva, Yu. V. Milman, and V.l. Trefilov, Phys. Status Solidi (a) 14, 177 (1972).
A. P. Gerk and D. Tabor, Nature 271, 732 (1978).
D.R. Clarke, M.C. Kroll, P.D. Kirchner, R.F. Cook, and B.J. Hockey, Phys. Rev. Lett. 21, 2156 (1988).
G.M. Pharr, W.C. Oliver, and D.R. Clarke, Scripta Metall. 23, 1949 (1989).
G.M. Pharr, W.C. Oliver, and D.R. Clarke, J. Elec. Mater. 19, 881 (1990).
J. Z. Hu, L. D. Merkle, C. S. Menoni, and I. L. Spain, Phys. Rev. B 34, 4679 (1986).
M.C. Gupta and A.L. Ruoff, J. Appl. Phys. 51, 1072 (1980).
Steven Danyluk, Dae Soon Kim, and Juris Kalejs, J. Mater. Sci. Lett. 4, 1135 (1985).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Pharr, G.M., Oliver, W.C. & Harding, D.S. New evidence for a pressure-induced phase transformation during the indentation of silicon. Journal of Materials Research 6, 1129–1130 (1991). https://doi.org/10.1557/JMR.1991.1129
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1557/JMR.1991.1129