Abstract
Diamond-like films containing no hydrogen can be deposited from laser plasmas that are highly ionized. Growth rates of 0.5 µm/h over 100 cm2 areas have been realized on untreated substrates of a variety of materials including Si, Ge, ZnS, glass, and plastics. Measurements of optical properties and mass densities support the identification of this laser plasma diamond as a conglomerate of very fine grains of diamond polytypes in a matrix of other carbon forms.
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F. Davanloo, E. M. Juengerman, D. R. Jander, T. J. Lee, and C. B. Collins, J. Appl. Phys. 67, 2081 (1990).
C. L. Marquardt, R.T. Williams, and D. J. Nagel, in Plasma Synthesis and Etching of Electronic Materials, edited by R. P. H. Chang and B. Abeles (Mater. Res. Soc. Symp. Proc. 38, Pittsburgh, PA, 1985), p. 325.
A. Richter, H.J. Scheibe, W. Pompe, K.W. Brzezinka, and I. Muhling, J. Non-Cryst. Solids 88, 131 (1986).
T. Sato, S. Furuno, S. Iguchi, and M. Hanabusa, Jpn. J. Appl. Phys. 26, L1487 (1987).
J. Robertson and E. P. O’Reilly, Phys. Rev. B 35, 2946 (1987).
T. Sato, S. Furuno, S. Iguchi, and M. Hanabusa, Appl. Phys. A 45, 355 (1988).
S. S. Wagal, E. M. Juengerman, and C. B. Collins, Appl. Phys. Lett. 53, 187 (1988).
C. B. Collins, F. Davanloo, E. M. Juengerman, W. R. Osborn, and D. R. Jander, Appl. Phys. Lett. 54, 216 (1989).
J. Krishnaswamy, A. Rengan, J. Narayan, K. Vedam, and C. J. McHargue, Appl. Phys. Lett. 54, 2455 (1989).
A. P. Malshe, S. M. Chaudhari, S. M. Kanetkar, S. B. Ogale, S.V. Rajarshi, and S.T. Kshirsagar, J. Mater. Res. 4, 1238 (1989).
K. M. Merz, R. Hoffmann, and A.T. Balaban, J. Am. Chem. Soc. 109, 6742 (1987).
M. A. Tamor and C. H. Wu, J. Appl. Phys. 67, 1007 (1990).
N. Savvides and B. Window, J. Vac. Sci. Technol. A 3, 2386 (1985).
N. Savvides, J. Appl. Phys. 58, 518 (1985); 59, 4133 (1986).
J. Robertson, Adv. Phys. 32, 361 (1983).
C. Cohen-Tannoudji, B. Diu, and F. Laloe, Quantum Mechanics (Wiley, New York, 1977), Vol. 1, pp. 367–383.
S. Flügge, Practical Quantum Mechanics (Springer, New York, 1971), pp. 64–67.
D. S. Knight and W. B. White, J. Mater. Res. 4, 385 (1989).
J. Robertson, Adv. Phys. 35, 317 (1986).
F.V. Lenel, Mechanical Fundamentals of Consolidation, Metals Handbook, 9th ed. (American Society for Metals, 1978), Vol. 7, pp. 296–307.
T. Miyazawa, S. Misawa, S. Yoshida, and S. Gonda, J. Appl. Phys. 55, 188 (1984).
S. R. Kasi, H. Kang, and J.W. Rabalais, J. Vac. Sci. Technol. A 6, 1788 (1988).
P. Badziag, W. S. Verwoerd, W. P. Ellis, and N. R. Greiner, Nature 343, 244 (1990).
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Davanloo, F., Juengerman, E.M., Jander, D.R. et al. Laser plasma diamond. Journal of Materials Research 5, 2398–2404 (1990). https://doi.org/10.1557/JMR.1990.2398
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DOI: https://doi.org/10.1557/JMR.1990.2398