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Measurement of crystalline strain and orientation in diamond films grown by chemical vapor deposition

  • Diamond and Diamond-Like Materials
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Abstract

We have used x-ray diffraction to characterize diamond films grown in three characteristic morphologies by chemical vapor deposition. Each morphology has a fiber texture about the growth direction; we report the crystal axis aligned in this direction for each morphology. In all cases the average lattice constant agrees with that of bulk diamond; we report the range of strain in each sample.

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Authors and Affiliations

  1. Metals and Ceramics Division, Oak Ridge National Laboratory, 37831-6117, Oak Ridge, Tennessee, USA

    E. D. Specht, R. E. Clausing & L. Heatherly

Authors
  1. E. D. Specht
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  2. R. E. Clausing
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  3. L. Heatherly
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Specht, E.D., Clausing, R.E. & Heatherly, L. Measurement of crystalline strain and orientation in diamond films grown by chemical vapor deposition. Journal of Materials Research 5, 2351–2355 (1990). https://doi.org/10.1557/JMR.1990.2351

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  • DOI: https://doi.org/10.1557/JMR.1990.2351

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