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Characterization of diamond thin films: Diamond phase identification, surface morphology, and defect structures

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Abstract

Thin carbon films grown from a low pressure methane-hydrogen gas mixture by microwave plasma enhanced CVD have been examined by Auger electron spectroscopy, secondary ion mass spectrometry, electron and x-ray diffraction, electron energy loss spectroscopy, and electron microscopy. They were determined to be similar to natural diamond in terms of composition, structure, and bonding. The surface morphology of the diamond films was a function of position on the sample surface and the methane concentration in the feedgas. Well-faceted diamond crystals were observed near the center of the sample whereas a less faceted, cauliflower texture was observed near the edge of the sample, presumably due to variations in temperature across the surface of the sample. Regarding methane concentration effects, threefold {111} faceted diamond crystals were predominant on a film grown at 0.3% CH4 in H2 while fourfold {100} facets were observed on films grown in 1.0% and 2.0% CH4 in H2. Transmission electron microscopy of the diamond films has shown that the majority of diamond crystals have a very high defect density comprised of {111} twins, {111} stacking faults, and dislocations. In addition, cross-sectional TEM has revealed a 50 Å epitaxial layer of β3–SiC at the diamond-silicon interface of a film grown with 0.3% CH4 in H2 while no such layer was observed on a diamond film grown in 2.0% CH4 in H2.

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References

  1. Landolt and Börnstein, Numerical Data and Functional Relationships in Science and Technology (Springer-Verlag, 1987).

  2. J. E. Field, Properties of Diamond (Academic Press, London, 1979).

    Google Scholar 

  3. V. K. Bazhenov, I. M. Vikulin, and A. G. Gontar, Sov. Phys. Semi-cond. 19 (8), 829 (1985).

    Google Scholar 

  4. B. V. Derjaguin, B. V. Spitsyn, A. E. Gorodetsky, A. P. Zakharov, L. I. Bouilov, and A. E. Aleksenko, J. Crystal Growth 31, 44 (1975).

    Article  Google Scholar 

  5. B. V. Deryagin, D. V. Fedoseev, N. D. Polyanskaya, and E. V. Statenkova, Sov. Phys. Crystallogr. 21 (2), 239 (1976).

    Google Scholar 

  6. B. V. Deryagin, V. G. Lyuttsau, D. V. Fedoseev, and V. A. Ryabov, Sov. Phys. Dokl. 15 (1), 58 (1970).

    Google Scholar 

  7. D. V. Fedoseev, V. P. Varnin, and B. V. Deryagin, Sov. Phys. Dokl. 15 (8), 787 (1971).

    Google Scholar 

  8. M. W. Geis, presented at the Third Annual SDIO/IST-ONR Diamond Technology Initiative Symposium, Crystal City, VA, July (1988).

  9. H. Nakazawa, Y. Kanazawa, M. Kamo, and K. Osumi, Thin Solid Films 151 (2), 199 (1987).

    Article  CAS  Google Scholar 

  10. B. Singh, Y. Arie, A. W. Levine, and O. R. Mesker, Appl. Phys. Lett. 52 (6), 451 (1988).

    Article  CAS  Google Scholar 

  11. S. Matsumoto and Y. Matsui, J. Mater. Sci. 18, 1785 (1983).

    Article  CAS  Google Scholar 

  12. A. Sawabe and T. Inuzuka, Thin Solid Films 137, 89 (1986).

    Article  CAS  Google Scholar 

  13. S. Matsumoto, J. Mater. Sci. Lett. 4, 600 (1985).

    Article  CAS  Google Scholar 

  14. Y. Sato, M. Kamo, and N. Setaka, in High Tech Ceramics, edited by P. Vincenzini (Elsevier Science Publishers B. V., Amsterdam, 1987).

    Google Scholar 

  15. K. Kobashi, K. Nishimura, Y. Kawate, and T. Horiuchi, J. Vac. Sci. Technol. A 6 (3), 1816 (1988).

    Article  Google Scholar 

  16. H. Kawarada, K. S. Mar, and A. Hiraki, Jpn. J. Appl. Phys. 26 (6) L1032 (1987).

    Article  CAS  Google Scholar 

  17. M. Kamo, Y. Sato, S. Matsumoto, and N. Setaka, J. Cryst. Growth 62, 642 (1983).

    Article  CAS  Google Scholar 

  18. Y Mitsuda, Y. Kojima, T. Yoshida, and K. Akashi, J. Mater. Sci. 22, 1557 (1987).

    Article  CAS  Google Scholar 

  19. P. K. Bachmann, W. Drawl, Diane Knight, R. Weimer, and R. F. Messier, in Diamond and Diamond-Like Materials Synthesis, edited by G. H. Johnson, A. R. Badzian, and M. W. Geis (Materials Research Society, 1988).

  20. C. P. Chang, D. L. Flamm, D. E. Ibbotson, and J. A. Mucha, J. Appl. Phys. 63 (5), 1744 (1988).

    Article  CAS  Google Scholar 

  21. Y Saito, S. Matsuda, and S. Nogita, J. Mater. Sci. Lett. 5, 565 (1986).

    Article  CAS  Google Scholar 

  22. R. J. Nemanich, R. E. Shroder, J. T. Glass, and G. Lucovsky, to be published in the Proc. 19th Int. Conf. on the Physics of Semiconductors, Warsaw, Poland, August 1988.

  23. R. J. Nemanich, J. T. Glass, G. Lucovsky, and R. E. Shroder, J. Vac. Sei. Technol. 6 (3), 1783 (1988).

    Article  CAS  Google Scholar 

  24. H. Kawarada, K. S. Mar, J. Suzuki, T. Ito, H. Mori, H. Fujita, and A. Hiraki, Jpn. J. Appl. Phys. 26 (11), L1903 (1987).

    Article  CAS  Google Scholar 

  25. B. E. Williams, J. T. Glass, R. F. Davis, K. Kobashi, and Y. Kawate, in Diamond and Diamond-Like Materials Synthesis, edited by G. H. Johnson, A. R. Badzian, and M. W. Geis (Materials Research Society, 1988).

  26. K. Kobashi, K. Nishimura, Y. Kawate, and T. Horiuchi, Phys. Rev. B 38 (6), 4067 (1988).

    Article  Google Scholar 

  27. Handbook of Auger Electron Spectroscopy (JEOL Ltd., Tokyo, 1982).

  28. L. C. Feldman and J. W. Mayer, Fundamentals of Surface and Thin Film Analysis (North-Holland, New York, 1986).

    Google Scholar 

  29. H. A. Storms, K. F. Brown, and J. D. Stein, Anal. Chem. 49 (13), 2023 (1977).

    Article  CAS  Google Scholar 

  30. S. Berg and L. P. Andersson, Thin Solid Films 58, 117 (1979).

    Article  CAS  Google Scholar 

  31. D. C. Ingram, J. A. Woollam, and Bu-Abbud, Thin Solid Films 137, 225 (1986).

    Article  CAS  Google Scholar 

  32. J. C. Angus, Thin Solid Films 142, 145 (1986).

    Article  CAS  Google Scholar 

  33. O. Matsumoto, H. Toshima, and Y. Kanzaki, Thin Solid Films 128, 341 (1985).

    Article  CAS  Google Scholar 

  34. M. J. Mirtich, J. S. Sovey, and B. A. Banks, NASA Tech. Briefs, p. 139, May/June (1986).

  35. T. Mori and Y. Namba, J. Vac. Sci. Technol. A 1 (1), 23 (1983).

    Article  Google Scholar 

  36. F. R. McFeely, S. P. Kowalczyk, L. Ley, R. G. Cavell, R. A. Pollak, and D. A. Shirley, Phys. Rev. B 9 (12), 5268 (1974).

    Article  Google Scholar 

  37. P. G. Lurie and J. M. Wilson, Surf. Sci. 65, 476 (1977).

    Article  CAS  Google Scholar 

  38. H. H. Madden, J. Vac. Sci. Technol. 18 (3), 677 (1981).

    Article  CAS  Google Scholar 

  39. R. F. Egerton and M. J. Whelan, Philos. Mag. 30, 739 (1974).

    Article  CAS  Google Scholar 

  40. S. A. Solin and A. K. Ramdas, Phys. Rev. B 1 (4), 1687 (1970).

    Article  Google Scholar 

  41. N. Wada and S. A. Solin, Physica B 105, 353 (1981).

    Article  CAS  Google Scholar 

  42. G. S. Woods, Philos. Mag. 23, 473 (1971).

    Article  CAS  Google Scholar 

  43. G. S. Woods, Philos. Mag. 34 (6), 993 (1976).

    Article  CAS  Google Scholar 

  44. L. F. Trueb, J. Appl. Phys. 39 (10), 4707 (1968).

    Article  CAS  Google Scholar 

  45. C. Phaal and G. Zuidema, Philos. Mag. 14 (127), 79 (1966).

    Article  CAS  Google Scholar 

  46. Y. Moriyoshi, M. Kamo, N. Setaka, and Y. Sato, J. Mater. Sci. 18, 217 (1983).

    Article  CAS  Google Scholar 

  47. P. Humble, Proc. R. Soc. London, A 381, 65 (1982).

    Article  CAS  Google Scholar 

  48. P. Humble, D. F. Lynch, and A. Olsen, Philos. Mag. A 52 (5), 623 (1985).

    Article  Google Scholar 

  49. P. Humble, J. K. Mackenzie, and A. Olsen, Philos. Mag. A 52 (5), 605 (1985).

    Article  Google Scholar 

  50. C. H. Carter, R. F. Davis, and S. R. Nutt, J. Mater. Res. 1 (6), 811 (1986).

    Article  CAS  Google Scholar 

  51. H. P. Liaw and R. F. Davis, J. Electrochem. Soc. 12 (131), 3014 (1984).

    Article  Google Scholar 

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Authors and Affiliations

  1. Department of Materials Science and Engineering, North Carolina State University, North Carolina, 27695-7907, Raleigh, USA

    B. E. Williams & J. T. Glass

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  1. B. E. Williams
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  2. J. T. Glass
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Williams, B.E., Glass, J.T. Characterization of diamond thin films: Diamond phase identification, surface morphology, and defect structures. Journal of Materials Research 4, 373–384 (1989). https://doi.org/10.1557/JMR.1989.0373

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  • DOI: https://doi.org/10.1557/JMR.1989.0373

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