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Ion beam processing of LiNbO3

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Abstract

Ion implantation and ion beam mixing have been investigated as alternative techniques to hightemperature diffusion for introducing dopants into LiNbO3. Heavy ion bombardment at both 77 and 300 K initiated a near-surface decomposition causing Li to diffuse to the surface where it formed a nonuniform agglomerate. The damage and annealing characteristics of this effect were studied by ion scattering/channeling, secondary ion mass spectrometry, and optical microscopy. The origins of the surface decomposition are discussed along with possible solutions, and selected samples were evaluated for waveguide properties.

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Authors and Affiliations

  1. Oak Ridge National Laboratory, Oak Ridge, Tennessee, 37831, USA

    B. R. Appleton, G. M. Beardsley, G. C. Farlow & W. H. Christie

  2. U. S. Army Missile Laboratory, Redstone, Arsenal, Alabama, 35898, USA

    P. R. Ashley

Authors
  1. B. R. Appleton
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  2. G. M. Beardsley
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  3. G. C. Farlow
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  4. W. H. Christie
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  5. P. R. Ashley
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Appleton, B.R., Beardsley, G.M., Farlow, G.C. et al. Ion beam processing of LiNbO3. Journal of Materials Research 1, 104–113 (1986). https://doi.org/10.1557/JMR.1986.0104

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  • DOI: https://doi.org/10.1557/JMR.1986.0104

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