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Influence of a piezoelectric ZnO intermediate layer on Rayleigh waves propagating in Sc43%AlN57%/ZnO/diamond hetero-structures subjected to uniaxial stress

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Abstract

Surface acoustic waves (SAWs) are of practical importance across several fields. Particularly, a wide range of SAW devices is available, which are based on the stacking piezoelectric layered hetero-structures. As such, efficient and stable algorithm of analyzing electromechanical coupling factor (K2) should be of specific interest, inspiring a variety of piezoelectric layered structures. Motivated by the above considerations, this paper exploits the performance of Sc43% AlN57%/ZnO/diamond piezoelectric hetero-structures using matrix and polynomial methods. Consequently, dispersion curves, the electromechanical coupling factor and profiles of Rayleigh waves are calculated, in which the properties of hexagonal intermediate ZnO layer are varied. Here, \( (0001) - [10\bar{1}0]{\text{ZnO}} \) or \( (11\bar{2}0) - [0001]{\text{ZnO}} \) directions of the middle layer were integrated with Sc43% AlN57%/diamond to be a composite hetero-structure with a larger K2 of SAW. Accordingly, a commercial ZnO specimen was characterized by scanning electron microscopy (SEM) as well as Raman and XRD spectroscopy to determine its available crystallographic directions and the C-axis hexagonal character. Comparing with conventional AlN/diamond hetero-structures, the inclusion of ZnO as the intermediate layer provides with an excellent electromechanical coupling factor which significantly improves the \( (11\bar{2}0) - [0001] \) structure. However, comparing with the ZnO/diamond hetero-structure, a high phase velocity (Vph) was observed. Therefore, the development of a well-balanced structure that maximizes the values of Vph and K2 is systematically challenging. Moreover, it was found that initial stresses have a significant effect on the Rayleigh wave velocities. Fundamental A0 Lamb mode can be generated in piezoelectric hetero-structures when the properties of substrate remain very low relative to the film. Numerical results obtained in this paper can provide a deeper insight into the nature of the Rayleigh wave behaviors in piezoelectric hetero-structures, involving a ZnO intermediate layer.

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Acknowledgements

This work was supported by the National Natural Science Foundation of China through Grant Nos. 11621062 and 11772295 and was also partly supported by the Fundamental Research Funds for the Central Universities 2016XZZX001-05 and Fundamental Research Funds for the Central Universities (Grant Number N2025001). Farid Takali is grateful for the funding provided to LPM laboratory by the Tunisian Ministry of Higher Education, Scientific Research.

Author information

Authors and Affiliations

  1. College of Civil Engineering and Architecture, Zhejiang University, Hangzhou, 310058, China

    Cherif Othmani & Chaofeng Lü

  2. Key Laboratory of Soft Machines and Smart Devices of Zhejiang Province, Zhejiang University, Hangzhou, 310027, China

    Chaofeng Lü

  3. Soft Matter Research Center, Zhejiang University, Hangzhou, 310027, China

    Chaofeng Lü

  4. Energy and Enironmental Materials Research Centre (E2MC), School of Metallurgy, Northeastern University, Shenyang, 110819, China

    Lazhar Labiadh & Ali Reza Kamali

  5. Department of Materials Science and Metallurgy, University of Cambridge, 27 Charles Babbage Rd, Cambridge, CB3 0FS, UK

    Ali Reza Kamali

  6. Faculty of Sciences of Sfax, Laboratory of Physics of Materials, University of Sfax, PB 815, 3018, Sfax, Tunisia

    Farid Takali

  7. National School of Engineers of Sfax (ENIS), Street Soukra Km 4, 3018, Sfax, Tunisia

    Farid Takali

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  1. Cherif Othmani
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  2. Lazhar Labiadh
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  3. Chaofeng Lü
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  4. Ali Reza Kamali
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  5. Farid Takali
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Correspondence to Chaofeng Lü.

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Othmani, C., Labiadh, L., Lü, C. et al. Influence of a piezoelectric ZnO intermediate layer on Rayleigh waves propagating in Sc43%AlN57%/ZnO/diamond hetero-structures subjected to uniaxial stress. Eur. Phys. J. Plus 135, 898 (2020). https://doi.org/10.1140/epjp/s13360-020-00912-9

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