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Influence of ion-beam plasma on ion extraction efficiency in a single-grid ion source

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  • Plasma Physics
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Abstract

The influence of ion-beam plasma on ion extraction efficiency in a single-grid ICP ion source is researched. The single-grid ion source is considered as a system with two plasmas, ion-beam plasma and the source plasma, separated by an extraction grid. Results of experimental measurements of the potentials of the two plasmas and the ion beam current dependence on these potentials are presented. It is shown that the ion extraction efficiency depends equally on both the acceleration potential and on the potential of the ion-beam plasma. The obtained results demonstrate the key role of the ion-beam plasma in the ion source operation, which is important in technological applications and space thrusters.

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References

  1. I.G. Brown, The Physics and Technology of Ion Sources: Second, Revised and Extended Edition (Wiley-VCH, New York, 2004)

  2. G. Rius, J. Llobet, M.J. Esplandiu, L. Sole, X. Borrise, F. Perez-Murano, Microelectron. Eng. 86, 892 (2009)

    Article  Google Scholar 

  3. E. Chason, S.T. Picraux, J.M. Poate, J.O. Borland, M.I. Current, T. Diaz de la Rubia, D.J. Eaglesham, O.W. Holland, M.E. Law, C.W. Magee, J.W. Mayer, J. Melngailis, A.F. Tasch, Appl. Phys. Rev. 81, 6513 (1997)

    Article  ADS  Google Scholar 

  4. H.R. Kaufman, J. Vac. Sci. Technol. A 4, 764 (1985).

    Article  ADS  Google Scholar 

  5. S.V. Dudin, D.V. Rafalskyi, Europhys Lett. 88, 55002 (2009)

    Article  ADS  Google Scholar 

  6. S.V. Dudin, D.V. Rafalskyi, A.V. Zykov, Rev. Sci. Instrum. 81, 083302 (2010)

    Article  ADS  Google Scholar 

  7. D.V. Rafalskyi, S.V. Dudin, Appl. Phys. Lett. 97, 051501 (2010)

    Article  ADS  Google Scholar 

  8. A.J.T. Holmes, Phys. Rev. A 19, 389 (1979)

    Article  ADS  Google Scholar 

  9. C. Charles, J. Phys. D 42, 163001 (2009)

    Article  ADS  Google Scholar 

  10. D.M. Goebel, I. Katz, Fundamentals of Electric Propulsion (Hoboken, USA, Wiley, 2008)

  11. S.V. Dudin, A.V. Zykov, V.I. Farenik, Rev. Sci. Instrum. 65, 1451 (1994)

    Article  ADS  Google Scholar 

  12. I. Langmuir, Phys. Rev. 2, 450 (1913)

    Article  ADS  Google Scholar 

  13. S.V. Dudin, Proceedings of the 21st EPS Conference on Controlled Fusion and Plasma Physics (Montpellier, France, 1994), p. 477

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Authors and Affiliations

  1. Department of Physics and Technology, V.N. Karazin Kharkiv National University, Kharkiv, Ukraine

    S. V. Dudin

  2. Scientific Center of Physical Technologies of Ukrainian Academy of Science and Ministry of Education and Science of Ukraine, Kharkiv, Ukraine

    D. V. Rafalskyi

Authors
  1. S. V. Dudin
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  2. D. V. Rafalskyi
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Correspondence to D. V. Rafalskyi.

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Dudin, S.V., Rafalskyi, D.V. Influence of ion-beam plasma on ion extraction efficiency in a single-grid ion source. Eur. Phys. J. D 65, 475–479 (2011). https://doi.org/10.1140/epjd/e2011-20402-y

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  • DOI: https://doi.org/10.1140/epjd/e2011-20402-y

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