Abstract
The influence of silicon crystallographic orientations (100), (110), (111) on the general properties of micromechanical (MEMS) accelerometers under the effect of operating temperatures is studied. ANSYS software was used to develop MEMS linear and pendulum accelerometers. Dependencies of self-resonant frequencies and scale factors on ambient temperature at different orientations of silicon structure have been determined.
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Published in Russian in Giroskopiya i Navigatsiya, 2011, No. 4, pp. 92–98.
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Fedorov, M.V. Influence of silicon crystallographic orientation on mechanical properties of MEMS accelerometers. Gyroscopy Navig. 3, 210–214 (2012). https://doi.org/10.1134/S2075108712030066
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DOI: https://doi.org/10.1134/S2075108712030066