Abstract
This paper considers a superminiature MEMS gyro with a volume of the sensor and suspension of less than 0.2 mm3. Mathematical models for calculating and analyzing the natural frequencies of the distributed system elastic suspension-sensitive element of a MEMS gyro were constructed and analyzed. The required algorithms and software were developed. The determined resonance frequencies enable automatic selection of the geometric parameters of elastic suspension, which provide the sensor resonance tuning. The influence of manufacturing tolerances on the suspension characteristics was estimated.
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Published in Russian in Giroskopiya i Navigatsiya, 2011, No. 2, pp. 51–64.
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Dzhashitov, V.E., Pankratov, V.M. Elastic suspension of a superminiature MEMS gyro. Gyroscopy Navig. 2, 239–246 (2011). https://doi.org/10.1134/S2075108711040079
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DOI: https://doi.org/10.1134/S2075108711040079