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Strength analysis of MEMS gyro elastic suspensions

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Abstract

The principles of designing a MEMS gyro with consideration for strength conditions of the elastic suspension are considered. The main relations for calculation of elastic element parameters are given. The effects caused by vibrations and shocks and conditioned by the presence of stops in the gyro construction are discussed.

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Authors and Affiliations

  1. Concern CSRI Elektropribor, JSC, ul. Malaya Posadskaya 30, St. Petersburg, 197046, Russia

    M. I. Evstifeev, D. V. Rozentsvein & I. B. Chelpanov

Authors
  1. M. I. Evstifeev
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  2. D. V. Rozentsvein
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  3. I. B. Chelpanov
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Additional information

Published in Russian in Giroskopiya i Navigatsiya, 2009, No. 3, pp. 23–35.

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Evstifeev, M.I., Rozentsvein, D.V. & Chelpanov, I.B. Strength analysis of MEMS gyro elastic suspensions. Gyroscopy Navig. 1, 263–271 (2010). https://doi.org/10.1134/S207510871004005X

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  • DOI: https://doi.org/10.1134/S207510871004005X

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