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Mathematical model of a micromechanical accelerometer with temperature influences, dynamic effects, and the thermoelastic stress-strain state taken into account

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Abstract

A comprehensive mathematical model of an accelerometer and its basic micromechanical sensing element is constructed that allows us to calculate and analyze the influence of mechanical and temperature effects, and of geometric, electromechanical, and other accelerometer characteristics and parameters, on the outgoing signals of the device with dynamic effects taken into account. The comprehensive model includes interlinked hierarchical mathematical models of the thermal processes of the accelerometer and its micromechanical sensing element, a finite-element model of the thermoelastic stress-strain state of the micromechanical sensing element, and a mathematical model of the dynamic drift due to temperature and deformation fields. Qualitative and quantitative estimates of the parameters of the thermal processes, the stress-strain state, and the drift of the accelerometer are obtained. Recommendations for minimizing drift are elaborated.

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References

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Authors and Affiliations

  1. Institute of Precision Mechanics and Control, RAS, Saratov, Russia

    M. A. Barulina, V. E. Dzhashitov & V. M. Pankratov

  2. Scientific Research Institute for Physical Measurements, Penza, Russia

    M. A. Kalinin & A. A. Papko

Authors
  1. M. A. Barulina
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  2. V. E. Dzhashitov
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  3. V. M. Pankratov
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  4. M. A. Kalinin
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  5. A. A. Papko
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Additional information

Original Russian Text © M.A. Barulina, V.E. Dzhashitov, V.M. Pankratov, M.A. Kalinin, A.A. Papko, 2008, published in Giroskopiya i Navigatsiya, 2008, No. 1, pp. 55–70.

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Barulina, M.A., Dzhashitov, V.E., Pankratov, V.M. et al. Mathematical model of a micromechanical accelerometer with temperature influences, dynamic effects, and the thermoelastic stress-strain state taken into account. Gyroscopy Navig. 1, 52–61 (2010). https://doi.org/10.1134/S2075108710010086

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  • DOI: https://doi.org/10.1134/S2075108710010086

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