Abstract
The structure and properties of Ti–B–N, Ti–Cr–B–N and Ti–Si–B–C–N coatings, deposited by magnetron sputtering are investigated. Various approaches to increasing adhesion strength are considered: deposition of sublayers, application of a high bias voltage at the beginning of deposition, preliminary ion etching of a substrate, and implantation by high-energy ions at various stages of deposition. Scratch testing is used to evaluate coating adhesion.
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ACKNOWLEDGMENTS
We are grateful to M.Ya. Bychkova for assistance in the study of coatings by the method of scratch testing.
Funding
This work was supported by the Ministry of Education and Science of the Russian Federation (state order no. 11.7172.2017/8.9).
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Translated by Sh. Galyaltdinov
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Kiryukhantsev-Korneev, P.V., Sheveiko, A.N. & Petrzhik, M.I. Approaches to Increasing the Adhesion Strength of Hard Wear-Resistant Nanostructured Coatings Based on the Ti–B–(Cr, Si, C)–N System. Prot Met Phys Chem Surf 55, 502–510 (2019). https://doi.org/10.1134/S2070205119040087
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DOI: https://doi.org/10.1134/S2070205119040087