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Influence of Microstructure, Composition and Morphology on Tribological Performance of WTiN Coatings Obtained by DC Magnetron Sputtering at Various Working Pressures

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Abstract

In this work, WTiN thin films were produced on silicon substrates using the DC magnetron sputtering technique varying the working pressure and keeping the power constant at 90 W and conducting the process at room temperature. The structure and morphology of the coatings were analyzed using the x-ray diffraction technique, which allowed the identification of a rock salt type FCC structure, with a relatively low micro-strain, and a grain size in the order of nm exhibiting a nanostructure formation. Elemental composition and the binding energies of samples were obtained using x-ray photoelectron spectroscopy and showed W-Ti-N chemical bonds and hence the formation of the ternary nitride. Moreover, a great influence of the pressure on the stoichiometry was identified, as a result of the differences in the deceleration and diffusion behavior of W and Ti atoms. The surface grain size and roughness (on average approximately 34 and 8.7 nm, respectively) of the coatings were determined using atomic force microscopy. Changes in the morphology can be attributed to re-sputtering and the adatoms mobility processes, as a part of the growth mechanism. Finally, for determining the tribological behavior, scratch and pin on disk tests were conducted. According to the results, the roughness and the pressure had a great influence on the coefficient of friction and the wear rate; however, the working pressure had no significant influence on the adherence of the films.

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Acknowledgments

The authors gratefully acknowledge the financial support provided by Dirección Nacional de Investigaciones of the Universidad Nacional de Colombia (DIMA) under the project 34567. We have also been able to pursue this research with the help of Laboratorio de Superfícies e Nanoestruturas—Centro Brasilero de Pesquisas Físicas and Laboratorio de Materiales y Procesos—Universidad Nacional de Colombia.

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Authors and Affiliations

  1. Laboratorio de Física del Plasma, Universidad Nacional de Colombia Sede Manizales, Km. 9 vía al Magdalena, Manizales, Colombia

    R. F. Londoño-Menjura, D. Escobar & E. Restrepo-Parra

  2. Universidad Industrial de Santander, Bucaramanga, Santander, Colombia

    R. Ospina & J. H. Quintero

  3. PCM Computacional Applications, Universidad Nacional de Colombia Sede Manizales, Km. 9 vía al Magdalena, Manizales, Colombia

    D. Escobar & E. Restrepo-Parra

  4. Grupo de investigación AFIS, Universidad Nacional de Colombia, Bogotá, Colombia

    J. J. Olaya

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  1. R. F. Londoño-Menjura
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  2. R. Ospina
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  3. D. Escobar
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  4. J. H. Quintero
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Correspondence to D. Escobar.

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Londoño-Menjura, R.F., Ospina, R., Escobar, D. et al. Influence of Microstructure, Composition and Morphology on Tribological Performance of WTiN Coatings Obtained by DC Magnetron Sputtering at Various Working Pressures. J. of Materi Eng and Perform 29, 5203–5213 (2020). https://doi.org/10.1007/s11665-020-05031-1

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