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X-ray fluorescence analysis of chalcogenide glass with electron beam fluorescence excitation

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Abstract

The method of X-ray fluorescence analysis with the fluorescence excitation by an electron beam with 30 keV energy was used to determine the germanium, arsenic, and selenium content in the Ge1–x Se x , As1–x Se x , and Ge1–xy AsySe x glassy alloys. This technique allows determining the quantitative glass composition with an accuracy of ±0.0002 in the surface layer of a depth of ~0.1 µm from parameters x and y of the linear calibration dependences.

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References

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Correspondence to P. P. Seregin.

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Original Russian Text © A.V. Marchenko, K.U. Bobokhuzhaev, A.V. Nikolaeva, F.S. Nasredinov, P.P. Seregin, 2015, published in Fizika i Khimiya Stekla.

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Marchenko, A.V., Bobokhuzhaev, K.U., Nikolaeva, A.V. et al. X-ray fluorescence analysis of chalcogenide glass with electron beam fluorescence excitation. Glass Phys Chem 41, 474–477 (2015). https://doi.org/10.1134/S1087659615050089

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  • DOI: https://doi.org/10.1134/S1087659615050089

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