Abstract
X-ray fluorescence analysis with fluorescence excitation by an electron beam with an energy of 30 kV is applied to determine the germanium, arsenic, and selenium contents in Ge1–x Se x , As1–x Se x , and Ge1–x–y As y Se x glassy alloys. Using calibration dependences, the quantitative composition of the glasses is determined with an accuracy of ±0.0002 for parameters x and y in a surface layer ~0.1 µm deep.
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G. A. Bordovskii, A. V. Marchenko, P. P. Seregin, N. N. Smirnova, and E. I. Terukov, Tech. Phys. Lett. 35, 397 (2009).
G. A. Bordovskii, A. V. Marchenko, P. P. Seregin, N. N. Smirnova, and E. I. Terukov, Semiconductors 44, 24 (2010).
G. A. Bordovskii, P. V. Gladkikh, I. V. Eremin, A. V. Marchenko, P. P. Seregin, N. N. Smirnova, and E. I. Terukov, Tech. Phys. Lett. 37, 250 (2011).
G. A. Bordovskii, A. V. Marchenko, A. V. Nikolaeva, P. P. Seregin, and E. I. Terukov, Semiconductors 48, 257 (2014).
M. A. Blokhin and I. G. Shweitser, X-Ray Spectrum Directory (Nauka, Moscow, 1982) [in Russian].
L. A. Vainshtein, I. I. Sobel’man, and E. A. Yukov, Excitation of Atoms and Broadening of Spectral Lines (Nauka, Moscow, 1979; Springer, New York, 2002).
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Original Russian Text © E.I. Terukov, P.P. Seregin, A.V. Marchenko, D.V. Zhilina, K.U. Bobokhuzhaev, 2015, published in Fizika i Tekhnika Poluprovodnikov, 2015, Vol. 49, No. 10, pp. 1397–1401.
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Terukov, E.I., Seregin, P.P., Marchenko, A.V. et al. X-ray fluorescence analysis of Ge1–x Se x , As1–x Se x , and Ge1–x–y As y Se x glasses using electronic excitation. Semiconductors 49, 1352–1356 (2015). https://doi.org/10.1134/S1063782615100255
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DOI: https://doi.org/10.1134/S1063782615100255