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Films based on the phases in the Si-C-N System: Part 1. Synthesis and characterization of bis(trimethylsilyl)ethylamine as a precursor

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Abstract

The characterization of bis(trimethylsilyl)ethylamine was carried out using a combination of IR, UV, 1H, 13C, 29Si, and 15N NMR spectroscopy, as well as elemental analysis. The spectral characteristics of the compound were determined. The temperature dependence of the saturated vapor pressure was established by tensimetric studies, and the thermodynamic characteristics of vaporization were calculated. Thermodynamic simulation of the chemical vapor deposition was performed and was used as a basis for predicting the composition of the deposited phase complexes depending on the type of reagent and the process conditions.

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Authors and Affiliations

  1. Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, pr. Akademika Lavrent’eva 3, Novosibirsk, 630090, Russia

    S. V. Sysoev, A. O. Kolontaeva, L. D. Nikulina & M. L. Kosinova

  2. Favorsky Irkutsk Institute of Chemistry, Siberian Branch, Russian Academy of Sciences, ul. Favorskogo 1, Irkutsk, 664033, Russia

    F. A. Kuznetsov, V. I. Rakhlin, A. V. Lis & M. G. Voronkov

  3. Grebenshchikov Institute of Silicate Chemistry, Russian Academy of Sciences, nab. Makarova 2, St. Petersburg, 199034, Russia

    M. G. Voronkov

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  1. S. V. Sysoev
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  2. A. O. Kolontaeva
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  3. L. D. Nikulina
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  4. M. L. Kosinova
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  5. F. A. Kuznetsov
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  6. V. I. Rakhlin
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  7. A. V. Lis
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  8. M. G. Voronkov
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Correspondence to M. L. Kosinova.

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Original Russian Text © S.V. Sysoev, A.O. Kolontaeva, L.D. Nikulina, M.L. Kosinova, F.A. Kuznetsov, V.I. Rakhlin, A.V. Lis, M.G. Voronkov, 2012, published in Fizika i Khimiya Stekla.

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Sysoev, S.V., Kolontaeva, A.O., Nikulina, L.D. et al. Films based on the phases in the Si-C-N System: Part 1. Synthesis and characterization of bis(trimethylsilyl)ethylamine as a precursor. Glass Phys Chem 38, 8–14 (2012). https://doi.org/10.1134/S1087659612010129

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