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Synthesis and Physicochemical Properties of Nanocrystalline Silicon Carbonitride Films Deposited by Microwave Plasma from Organoelement Compounds

  • Proceedings of the Topical Meeting of the European Ceramic Society “Nanoparticles, Nanostructures, and Nanocomposites”
  • (St. Petersburg, Russia, July 5–7, 2004)
  • Published:
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Abstract

Nanocrystalline films of a ternary compound, namely, silicon carbonitride SiCxNy, are prepared by plasma-enhanced chemical vapor deposition at temperatures of 473–1173 K with the use of a complex gaseous mixture of hexamethyldisilazane Si2NH(CH3)6, ammonia, and helium. The chemical and phase compositions and the physicochemical properties of the films are investigated using IR, Auger electron, and X-ray photoelectron spectroscopy; ellipsometry; synchrotron X-ray powder diffraction; electron and atomic-force microscopy; microhardness measurements with a nanoindenter; and electrical measurements. Correlations of the composition of the initial gas phase and the synthesis temperature with a number of functional properties of the SiCxNy silicon carbonitride films are revealed.

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Authors and Affiliations

  1. Institute of Inorganic Chemistry, Siberian Division, Russian Academy of Sciences, pr. Akademika Lavrent’eva 3, Novosibirsk, 630090, Russia

    N. I. Fainer, M. L. Kosinova, Yu. M. Rumyantsev, E. A. Maksimovskii & F. A. Kuznetsov

  2. Institute of Semiconductor Physics, Siberian Division, Russian Academy of Sciences, pr. Akademika Lavrent’eva 13, Novosibirsk, 630090, Russia

    V. G. Kesler & V. V. Kirienko

  3. Institute of Physics, Chinese Academy of Sciences, PO Box 603, Beijing, 100080, People’s Republic of China

    Bao-Shan Han & Cheng Lu

Authors
  1. N. I. Fainer
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  2. M. L. Kosinova
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  3. Yu. M. Rumyantsev
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  4. E. A. Maksimovskii
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  5. F. A. Kuznetsov
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  6. V. G. Kesler
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  7. V. V. Kirienko
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  8. Bao-Shan Han
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  9. Cheng Lu
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Additional information

Original Russian Text Copyright © 2005 by Fizika i Khimiya Stekla, Fainer, Kosinova, Rumyantsev, Maksimovskii, Kuznetsov, Kesler, Kirienko, Han Bao-Shan, Lu Cheng.

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Fainer, N.I., Kosinova, M.L., Rumyantsev, Y.M. et al. Synthesis and Physicochemical Properties of Nanocrystalline Silicon Carbonitride Films Deposited by Microwave Plasma from Organoelement Compounds. Glass Phys Chem 31, 427–432 (2005). https://doi.org/10.1007/s10720-005-0079-8

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  • DOI: https://doi.org/10.1007/s10720-005-0079-8

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