Skip to main content
SpringerLink
Log in

Deep purification of hexamethyldisilazane

  • Organic Synthesis and Industrial Organic Chemistry
  • Published:
Russian Journal of Applied Chemistry Aims and scope Submit manuscript

Abstract

We considered a deep cleaning of 1,1,1,3,3,3-hexamethyldisilazane used in microelectronics and organoelement synthesis from a series of homogeneous and heterogeneous admixtures by various physicochemical methods.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. Moreau, W., Semiconductor Lithography: Principles, Practices, and Materials, Springer, 1987.

  2. Sulimin, A.D., Kosheleva, N.A., Neustroev, S.A., et al., Abstracts of Papers, III Vesoyuznyi simpozium po plazmokhimii (3rd All-Union Symp. on Plasmo Chemistry), Moscow: Nauka, 1979.

    Google Scholar 

  3. Sulimin, A.D., Neustroev, S.A., Morozova, A.S., et al., Khim. Vysok. Energ., 1973. no. 3, pp. 202–205.

  4. Sulimin, A.D., Yakovenko, V.G., Lukanov, N.M., et al., Sbornic nauchykh trudov MIET po problemam mikroelektroniki (Coll. of Sci. Proceeding of MIET on Microelectronics Problems), 1975, pp. 148–152.

  5. Protective Groups in Organic Chemistry, McOmie, J.F.W., Ed., London: Plenum, 1973.

    Google Scholar 

  6. Grinberg, E.E., Nozdrya, S.M., Shmelev, L.V., and Khangazheev, S.Kh., Vysokochistye Veshchestva, 1993. no. 1, pp. 74–76.

  7. Grinberg, E.E., Ryabtseva, M.V., and Chzhao, Chzho, Vestn. MASI. Informatika, Ekologiya, Ekonomika, 2004, vol. 7,ch. 3, pp. 28–31.

    Google Scholar 

  8. Khananashvili, L.M. and Andrianov, K.A., Tekhnologiya elementoorganicheskikh monomerov i polimerov (Technology of Organoelemental Monomers and Polymers), Moscow: Khimiya, 1983.

    Google Scholar 

  9. Kogan, V.B., Fridman, V.M., and Kafarov, V.V., Ravnovesie mezhdu zhidkost’yu i parom (Equilibrium between Liquid and Vapor), Moscow: Khimiya, 1966.

    Google Scholar 

  10. Zel’venskii, Ya.D., Titov, A.A., and Shalygin, V.A., Rektifikatsiya razbavlennykh rastvorov (Distillation of Diluted Solutions), Leningrad: Khimiya, 1974.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Federal State Unitary Enterprise “State Research Institute of Chemical Reagents and High Purity Chemicals”, Moscow, Russia

    E. E. Grinberg, V. I. Ukhin, M. V. Ryabtseva, Yu. I. Levin & I. E. Strel’nikova

  2. Irkutsk Institute of Chemistry, Siberian Branch of Russian Academy of Sciences, Irkutsk, Russia

    V. I. Rakhlin

Authors
  1. E. E. Grinberg
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. V. I. Ukhin
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. V. I. Rakhlin
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. M. V. Ryabtseva
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Yu. I. Levin
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. I. E. Strel’nikova
    View author publications

    You can also search for this author in PubMed Google Scholar

Additional information

Original Russian Text © E.E. Grinberg, V.I. Ukhin, V.I. Rakhlin, M.V. Ryabtseva, Yu.I. Levin, I.E. Strel’nikova, 2011, published in Zhurnal Prikladnoi Khimii, 2011, Vol. 84, No. 11, pp. 1823–1827.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Grinberg, E.E., Ukhin, V.I., Rakhlin, V.I. et al. Deep purification of hexamethyldisilazane. Russ J Appl Chem 84, 1909–1913 (2011). https://doi.org/10.1134/S1070427211110127

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S1070427211110127

Keywords

Search

Navigation