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Potential of thermodynamic evaluation of the efficiency of adhesion promoters

  • Organic Synthesis and Industrial Organic Chemistry
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Abstract

Method for evaluation of the efficiency of photoresist adhesion promoters is suggested. The method is based on a thermodynamic simulation of the reactivity of organosilicon compounds with respect to hydroxycontaining derivatives. The adequacy of the chosen technique was verified experimentally.

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Authors and Affiliations

  1. Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia

    V. A. Titov

  2. Favorskii Institute of Chemistry, Siberian Branch, Russian Academy of Sciences, Irkutsk, Russia

    V. I. Rakhlin

  3. State Research Institute of Chemical Reagents and Special-Purity Chemical Substances, Federal State Unitary Enterprise, Moscow, Russia

    E. E. Grinberg

Authors
  1. V. A. Titov
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  2. V. I. Rakhlin
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  3. E. E. Grinberg
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Additional information

Original Russian Text © V.A. Titov, V.I. Rakhlin, E.E. Grinberg, 2011, published in Zhurnal Prikladnoi Khimii, 2011, Vol. 84, No. 3, pp. 439–444.

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Titov, V.A., Rakhlin, V.I. & Grinberg, E.E. Potential of thermodynamic evaluation of the efficiency of adhesion promoters. Russ J Appl Chem 84, 431–436 (2011). https://doi.org/10.1134/S1070427211030177

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  • DOI: https://doi.org/10.1134/S1070427211030177

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