Abstract
The main characteristics of a new method for measuring the surface-roughness parameters are analyzed. The method is based on scattering of light in integrated optical waveguides. It is shown that, with the use of standard instruments, the new method provides for sensitivity and resolution unprecedented in optical methods.
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Original Russian Text © A.N. Osovitskii, L.V. Tupanov, 2008, published in Radiotekhnika i Elektronika, 2008, Vol. 53, No. 12, pp. 1516–1520.
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Osovitskii, A.N., Tupanov, L.V. Characteristics of a waveguide method for measuring the surface-roughness parameters of smooth dielectrics. J. Commun. Technol. Electron. 53, 1430–1434 (2008). https://doi.org/10.1134/S1064226908120097
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DOI: https://doi.org/10.1134/S1064226908120097