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Laser Etching of Germanium

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Abstract

Investigation of a polished surface of germanium single crystals scanned with a focused beam of pulse-frequency modulated UV radiation of Nd:YAG laser showed evidence of laser-induced surface etching at subthreshold energy densities (E ∼ 0.5–1.15 J/cm2) in the absence of noticeable traces of crater formation. It is suggested that the ablation centers nucleate on dislocations escaping at the surface of germanium crystals.

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Funding

This work was carried out in the framework of a state order in in science (projects nos. 0057-2019-0005 and 0817-2020-0007) using the resources of the Center for Collective Use of Tver State University.

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Authors and Affiliations

  1. Institute for Electrophysics and Electric Power, Russian Academy of Sciences, 191186, St. Petersburg, Russia

    V. Yu. Zheleznov, T. V. Malinskiy, S. I. Mikolutskiy, V. E. Rogalin, S. A. Filin, Yu. V. Khomich & V. A. Yamshchikov

  2. Tver State University, 170000, Tver, Russia

    I. A. Kaplunov & A. I. Ivanova

Authors
  1. V. Yu. Zheleznov
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  2. T. V. Malinskiy
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  3. S. I. Mikolutskiy
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  4. V. E. Rogalin
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  5. S. A. Filin
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  6. Yu. V. Khomich
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  7. V. A. Yamshchikov
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  8. I. A. Kaplunov
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  9. A. I. Ivanova
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Corresponding author

Correspondence to I. A. Kaplunov.

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Translated by P. Pozdeev

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Zheleznov, V.Y., Malinskiy, T.V., Mikolutskiy, S.I. et al. Laser Etching of Germanium. Tech. Phys. Lett. 47, 734–736 (2021). https://doi.org/10.1134/S1063785021070282

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  • DOI: https://doi.org/10.1134/S1063785021070282

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