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Formation of Surface Micro and Nanostructures When Exposed to Laser UV and VUV Radiation of Nanosecond Duration

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Advanced Materials

Part of the book series: Springer Proceedings in Materials ((SPM,volume 6))

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Abstract

Micro- and nanostructures improved different surface properties, which is used in various fields of science and technology. It is of a great interest to develop the physical foundations of new effective methods for creation of such structures. The paper proposes a method of direct laser micro- and nanostructuring based on nanosecond lasers with radiation of UV and VUV range. The method allows surface laser treatment of materials with different physical properties: metallic alloys, ceramics, diamond-like films, semiconductors. Formation of surface micro and nanostructures on the surfaces of diamond-like film, germanium, aluminum oxide and zirconium bronze is demonstrated. A theoretical model of nanostructure formation on solid surface melted by nanosecond laser pulse is considered. Moreover, a simple model for formation of conical structures at laser ablation without melting is described.

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Acknowledgements

This research was performed into framework of State assignment of IEE RAS.

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Authors and Affiliations

  1. Institute for Electrophysics and Electric Power RAS, Saint-Petersburg, Russia

    Vladislav Khomich, Vladimir Yamshchikov & Sergey Mikolutskiy

Authors
  1. Vladislav Khomich
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  2. Vladimir Yamshchikov
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  3. Sergey Mikolutskiy
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Corresponding author

Correspondence to Vladimir Yamshchikov .

Editor information

Editors and Affiliations

  1. I. I. Vorovich Mathematics, Mechanics and Computer Sciences Institute, Southern Federal University, Rostov-on-Don, Russia

    Ivan A. Parinov

  2. Department of Microelectronics Engineering, National Kaohsiung University of Science and Technology, Kaohsiung, Taiwan

    Shun-Hsyung Chang

  3. School of Mechanical Engineering, Hanoi University of Science and Technology, Hanoi, Vietnam

    Banh Tien Long

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Khomich, V., Yamshchikov, V., Mikolutskiy, S. (2020). Formation of Surface Micro and Nanostructures When Exposed to Laser UV and VUV Radiation of Nanosecond Duration. In: Parinov, I., Chang, SH., Long, B. (eds) Advanced Materials. Springer Proceedings in Materials, vol 6. Springer, Cham. https://doi.org/10.1007/978-3-030-45120-2_5

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