Skip to main content
SpringerLink
Log in

Energy Distributions of Secondary Charged Particles Sputtered by Gas Cluster Ions

  • Published:
Technical Physics Letters Aims and scope Submit manuscript

Abstract

Energy spectra of charged particles emitted from a polycrystalline copper target bombarded with argon and xenon cluster ions have been experimentally studied. Positive particles sputtered with gas cluster ions possess significantly lower energies than do particles sputtered with atomic argon. The spectra of charged particles emitted under bombardment with xenon cluster ions are systematically narrower than analogous spectra obtained under bombardment with argon clusters. The discovered laws can be explained from the standpoint of features of energy transfer from the cluster ion to the target.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1.
Fig. 2.

Similar content being viewed by others

REFERENCES

  1. P. Sigmund, Phys. Rev. 184, 383 (1969). https://doi.org/10.1103/PhysRev.184.383

    Article  ADS  Google Scholar 

  2. I. Yamada, J. Matsuo, N. Toyoda, and A. Kirkpatrick, Mater. Sci. Eng. R 34, 231 (2001). https://doi.org/10.1016/s0927-796x(01)00034-1

    Article  Google Scholar 

  3. Z. Insepov and I. Yamada, Nucl. Instrum. Methods Phys. Res., Sect. B 99, 248 (1995). https://doi.org/10.1016/0168-583X(95)00322-3

    Article  Google Scholar 

  4. V. S. Chernysh, A. E. Ieshkin, D. S. Kireev, A. V. Nazarov, and A. D. Zavilgelsky, Surf. Coat. Technol. 388, 125608 (2020). https://doi.org/10.1016/j.surfcoat.2020.125608

    Article  Google Scholar 

  5. N. G. Korobeishchikov, I. V. Nikolaev, and M. A. Roenko, Tech. Phys. Lett. 45, 274 (2019). https://doi.org/10.1134/S1063785019030295

    Article  ADS  Google Scholar 

  6. A. E. Ieshkin, K. D. Kushkina, D. S. Kireev, Yu. A. Ermakov, and V. S. Chernysh, Tech. Phys. Lett. 43, 95 (2017). https://doi.org/10.1134/S1063785017010205

    Article  ADS  Google Scholar 

  7. X. Zeng, V. Pelenovich, A. Ieshkin, A. Danilov, A. Tolstogouzov, W. Zuo, J. Ranjana, D. Hu, N. Devi, D. Fu, and X. Xiao, Rapid Commun. Mass Spectrom. 33, 1449 (2019). https://doi.org/10.1002/rcm.8489

    Article  ADS  Google Scholar 

  8. A. S. Ozcan, C. Lavoie, E. Alptekin, J. Jordan-Sweet, F. Zhu, A. Leith, B. D. Pfeifer, J. D. LaRose, and N. M. Russell, J. Appl. Phys. 119, 155301 (2016). https://doi.org/10.1063/1.4947054

    Article  ADS  Google Scholar 

  9. A. Delcorte and C. Poleunis, J. Phys. Chem. C 123, 19704 (2019). https://doi.org/10.1021/acs.jpcc.9b05363

    Article  Google Scholar 

  10. S. F. Belykh, A. B. Tolstoguzov, and A. A. Lozovan, JETP Lett. 101, 638 (2015). https://doi.org/10.7868/S0370274X15090118

    Article  ADS  Google Scholar 

  11. D. S. Kireev, A. V. Danilov, A. E. Ieshkin, and V. S. Chernysh, Vestn. RGRTU 66 (2), 40 (2018). https://doi.org/10.21667/1995-4565-2018-66-4-2-40-48

    Article  Google Scholar 

  12. V. A. Kurnaev and V. A. Urusov, Tech. Phys. 42, 663 (1997).

    Article  Google Scholar 

  13. V. M. Bukhanov, K. F. Minnebaev, I. F. Urazgil’din, and V. S. Chernysh, Sov. Phys. JETP 69, 853 (1989).

    ADS  Google Scholar 

  14. Z. Insepov and I. Yamada, Nucl. Instrum. Methods Phys. Res., Sect. B 112, 16 (1996). https://doi.org/10.1016/0168-583X(95)01127-7

    Article  Google Scholar 

  15. P. Sigmund and C. Claussen, J. Appl. Phys. 52, 990 (1981). https://doi.org/10.1063/1.328790

    Article  ADS  Google Scholar 

  16. Y. Kitazoe, N. Hiraoka, and Y. Yamamura, Surf. Sci. 111, 381 (1981). https://doi.org/10.1016/0039-6028(81)90396-4

    Article  ADS  Google Scholar 

  17. H. D. Hagstrum, Phys. Rev. 96, 336 (1954). https://doi.org/10.1103/PhysRev.96.336

    Article  ADS  Google Scholar 

Download references

Funding

This work was supported in part by the Ministry of Science and Higher Education of the Russian Federation in the framework of a state order to P.G. Demidov Yaroslavl State University, project no. 0856-2020-0006.

Author information

Authors and Affiliations

  1. Moscow State University, 119991, Moscow, Russia

    A. E. Ieshkin, A. A. Tatarintsev & D. S. Kireev

  2. Demidov Yaroslavl State University, 150003, Yaroslavl, Russia

    A. E. Ieshkin, V. I. Bachurin & A. S. Rudyi

Authors
  1. A. E. Ieshkin
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. A. A. Tatarintsev
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. D. S. Kireev
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. V. I. Bachurin
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. A. S. Rudyi
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to A. E. Ieshkin.

Ethics declarations

The authors declare that they have no conflicts of interest.

Additional information

Translated by P. Pozdeev

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Ieshkin, A.E., Tatarintsev, A.A., Kireev, D.S. et al. Energy Distributions of Secondary Charged Particles Sputtered by Gas Cluster Ions. Tech. Phys. Lett. 47, 381–384 (2021). https://doi.org/10.1134/S1063785021040192

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S1063785021040192

Keywords:

Search

Navigation