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Neutral cluster size and fragmentation during ion sputtering of solids

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Abstract

A theory of the ion sputtering of solids in the form of excited atomic clusters with their subsequent fragmentation has been developed. The theory is based on simple physical assumptions and agrees with experiment. The results are presented in the form of expressions convenient for practical application, which is demonstrated by calculation of the total yields of silver and indium clusters.

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References

  1. Fundamental and Applied Aspects of the Ion Sputtering of Solids, Compiled by E. S. Mashkova (Mir, Moscow, 1989) [in Russian].

    Google Scholar 

  2. P. Sigmund, Ion Beam Science: Solved and Unsolved Problems, Kong. Dan. Vidensk. Selsk. Mat. Fys. Medd. 52 (Part II), 377 (2006).

    Google Scholar 

  3. R. Behrisch and W. Eckstein, Sputtering by Particle Bombardment: Experiments and Computer Calculations from Threshold to MeV Energies (Springer, Berlin, 2007).

    Google Scholar 

  4. A. Wucher, Appl. Surf. Sci. 252, 6482 (2006).

    Article  ADS  Google Scholar 

  5. I. A. Baranov, Yu. V. Martynenko, S. O. Tsepelevich, and Yu. N. Yavlinskii, Sov. Phys. Usp. 31, 1015 (1988).

    Article  ADS  Google Scholar 

  6. Sputtering by Particle Bombardment III, Ed. by R. Behrisch and K. Wittmaack (Springer-Verlag, Ber-lin, 1991; Mir, Moscow, 1998).

    Google Scholar 

  7. V. I. Matveev and S. A. Kochkin, J. Exp. Theor. Phys. 110 (4), 722 (2010).

    Article  ADS  Google Scholar 

  8. V. I. Matveev, S. F. Belykh, and I. V. Verevkin, Tech. Phys. 44 (3), 323 (1999).

    Article  Google Scholar 

  9. S. F. Belykh, V. I. Matveev, I. V. Veryovkin, et al., Nucl. Instrum. Meth. Phys. Res. B 155, 409 (1999).

    Article  ADS  Google Scholar 

  10. C. Kittel, Introduction to Solid-State Physics, 5th ed. (Wiley, New York, 1976; Nauka, Moscow, 1978).

    Google Scholar 

  11. C. Staudt, R. Heinrich, and A. Wucher, Nucl. Instrum. Meth. Phys. Res. B 164–165, 677 (2000).

    Article  Google Scholar 

  12. C. Staudt and A. Wucher, Phys. Rev. B 66, 075419 (2002).

    Article  ADS  Google Scholar 

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Authors and Affiliations

  1. Northern (Arctic) Federal University, Arkhangelsk, 163002, Russia

    V. I. Matveev, D. N. Makarov & S. N. Kapustin

Authors
  1. V. I. Matveev
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  2. D. N. Makarov
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  3. S. N. Kapustin
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Correspondence to V. I. Matveev.

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Original Russian Text © V.I. Matveev, D.N. Makarov, S.N. Kapustin, 2015, published in Pis’ma v Zhurnal Tekhnicheskoi Fiziki, 2015, Vol. 41, No. 16, pp. 15–20.

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Matveev, V.I., Makarov, D.N. & Kapustin, S.N. Neutral cluster size and fragmentation during ion sputtering of solids. Tech. Phys. Lett. 41, 771–773 (2015). https://doi.org/10.1134/S106378501508026X

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  • DOI: https://doi.org/10.1134/S106378501508026X

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