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Experimental Observation of the Confinement of Atomic Collision Cascades during Ion Sputtering of Porous Silicon

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Abstract

Results of investigation of the mass spectra of secondary ions sputtered from bulk (continuous) and porous silicon targets with various characteristic core particle dimensions are presented. It has been established that the sputtering of nanostructured Si samples leads to a significant increase in the relative yield of massive cluster ions. This effect is especially pronounced when the characteristic nanoparticle size approaches the range of bombarding ions in the Si target. The obtained results are explained taking into account the confinement of atomic collision cascades.

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Authors and Affiliations

  1. Moscow State University, 119991, Moscow, Russia

    A. E. Ieshkin & S. E. Svyakhovskiy

  2. Ryazan State Radioengineering University, 390005, Ryazan, Russia

    A. B. Tolstoguzov

  3. Centre for Physics and Technological Research, Physics Department, Faculty of Science and Technology, Universidade Nova de Lisboa, Caparica, Portugal

    A. B. Tolstoguzov

  4. Key Laboratory of Artificial Micro- and Nanostructures of Ministry of Education and Hubei Key Laboratory of Nuclear Solid Physics, School of Physics and Technology, Wuhan University, Wuhan, China

    A. B. Tolstoguzov & V. O. Pelenovich

  5. Institute for Physics of Microstructures, Russian Academy of Sciences, 603087, Afonino, Nizhny Novgorod oblast, Russia

    M. N. Drozdov

Authors
  1. A. E. Ieshkin
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  2. A. B. Tolstoguzov
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  3. S. E. Svyakhovskiy
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  4. M. N. Drozdov
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  5. V. O. Pelenovich
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Correspondence to A. E. Ieshkin.

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Translated by P. Pozdeev

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Ieshkin, A.E., Tolstoguzov, A.B., Svyakhovskiy, S.E. et al. Experimental Observation of the Confinement of Atomic Collision Cascades during Ion Sputtering of Porous Silicon. Tech. Phys. Lett. 45, 37–40 (2019). https://doi.org/10.1134/S1063785019010267

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  • DOI: https://doi.org/10.1134/S1063785019010267

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