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The Effect of Boron on the Structure and Conductivity of Thin Films Obtained by Laser Ablation of Diamond with Deposition at 700°C

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Abstract

Structural features of CBx films obtained by pulsed laser ablation of targets made of pressed diamond powder with boron-powder additions at B/C atomic ratio of x = 0.33 have been studied. The films were deposited on heated substrates, so that diffusion processes involving C and B atoms on the surface and in the volume of films were possible. Selected conditions of film deposition ensured their effective doping with boron (0.4 ≤ x ≤ 0.6). The incorporation of B atoms was accompanied by the formation of B–C chemical bonds, whereas the formation of sp2 graphite bonds and their ordering in clusters with laminar packing was suppressed. The films possessed very low resistivity (~1.4 mΩ cm) at room temperature and exhibited metallic type of conductance on decreasing the temperature to 77 K.

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Correspondence to V. Yu. Fominski.

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Original Russian Text © R.I. Romanov, V.Yu. Fominski, P.V. Zinin, I.A. Troyan, D.V. Fominski, P.S. Dzhumaev, V.P. Filonenko, 2018, published in Pis’ma v Zhurnal Tekhnicheskoi Fiziki, 2018, Vol. 44, No. 12, pp. 16–24.

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Romanov, R.I., Fominski, V.Y., Zinin, P.V. et al. The Effect of Boron on the Structure and Conductivity of Thin Films Obtained by Laser Ablation of Diamond with Deposition at 700°C. Tech. Phys. Lett. 44, 511–514 (2018). https://doi.org/10.1134/S1063785018060263

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  • DOI: https://doi.org/10.1134/S1063785018060263

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