Abstract
Three-beam X-ray diffraction (XRD) has been measured using the Renninger scheme in epitaxial ZnO layers with various thicknesses and degrees of crystal perfection. The integral intensity of three-beam XRD reflections has been analyzed and compared to that of two-beam reflections in the Bragg and Laue geometry. It is established that, for thin ZnO layers grown in the presence of excess oxygen, the integral intensity of three-beam diffraction peaks and Laue reflections is much smaller than that for layers of the same thickness grown in the presence of excess zinc. This fact is explained by the formation of a textured sublayer in the former case.
Similar content being viewed by others
References
V. V. Ratnikov, R. N. Kyutt, S. V. Ivanov, M. P. Shcheglov, and A. Waag, Semiconductors 44(2), 251 (2010).
V. V. Ratnikov, R. N. Kyutt, T. V. Shubina, T. Pashkova, and B. Monemar, J. Phys. D: Appl. Phys. 34, A30 (2001).
J. Bläsing and A. Krost, Phys. Status Solidi A 201, R17 (2004).
R. N. Kyutt, Tech. Phys. 56(5), 668 (2011).
R. N. Kyutt and M. P. Scheglov, J. Appl. Crystallogr. 46(4), 861 (2013).
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © R.N. Kyutt, S.V. Ivanov, 2014, published in Pis’ma v Zhurnal Tekhnicheskoi Fiziki, 2014, Vol. 40, No. 20, pp. 22–28.
Rights and permissions
About this article
Cite this article
Kyutt, R.N., Ivanov, S.V. The structural state of epitaxial ZnO layers assessed by measuring the integral intensity of three- and two-beam X-ray diffraction. Tech. Phys. Lett. 40, 894–896 (2014). https://doi.org/10.1134/S106378501410023X
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S106378501410023X