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Application of diamond-like carbon films to increase transmission of semi-insulating GaAs crystals in the IR spectral range

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Abstract

The effect of treatments in plasmas of different gases and subsequent deposition of diamond-like carbon films (DCFs) on the transmission of semi-insulating GaAs crystals in the IR spectral range has been analyzed. It is shown that deposition of 1- to 1.5-μm DCFs makes it possible to increase the GaAs transmission in the range of 4–15 μm and that preliminary treatment in H+ or Ar+ plasma increases the optical transmission of the DCF-GaAs structure. A mechanism is proposed to explain the effect of plasma treatment on the optical transmission of semi-insulating GaAs in the IR spectral range.

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Authors and Affiliations

  1. Lashkarev Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Kyiv, 03028, Ukraine

    N. I. Klyui, A. I. Liptuga, V. B. Lozinskii, A. N. Lukyanov, A. P. Oksanich & V. A. Terban

  2. Kremenchug National University, Kremenchug, 39600, Ukraine

    N. I. Klyui, A. I. Liptuga, V. B. Lozinskii, A. N. Lukyanov, A. P. Oksanich & V. A. Terban

  3. Silicon Ltd, Svetlovodsk, 27507, Ukraine

    N. I. Klyui, A. I. Liptuga, V. B. Lozinskii, A. N. Lukyanov, A. P. Oksanich & V. A. Terban

Authors
  1. N. I. Klyui
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  2. A. I. Liptuga
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  3. V. B. Lozinskii
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  4. A. N. Lukyanov
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  5. A. P. Oksanich
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  6. V. A. Terban
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Corresponding author

Correspondence to N. I. Klyui.

Additional information

Original Russian Text © N.I. Klyui, A.I. Liptuga, V.B. Lozinskii, A.N. Lukyanov, A.P. Oksanich, V.A. Terban, 2012, published in Pis’ma v Zhurnal Tekhnicheskoi Fiziki, 2012, Vol. 38, No. 13, pp. 27–34.

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Klyui, N.I., Liptuga, A.I., Lozinskii, V.B. et al. Application of diamond-like carbon films to increase transmission of semi-insulating GaAs crystals in the IR spectral range. Tech. Phys. Lett. 38, 609–612 (2012). https://doi.org/10.1134/S106378501207005X

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  • DOI: https://doi.org/10.1134/S106378501207005X

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