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Diamond film synthesis in high-alternating-current glow discharge

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Abstract

Results of experiments with the deposition of polycrystalline diamond films onto silicon, titanium, and molybdenum substrates in a specially designed ac glow discharge system are presented. The phase composition and morphology of deposited films have been studied using the atomic force microscopy and X-ray diffraction techniques. It is established that the obtained diamond films possess high purity and degree of crystallinity. Inclusions of non-diamond carbon phases are absent. The rate of diamond film growth in the proposed system is 6–7 μm/h.

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References

  1. V. M. Polushkin, S. N. Polyakov, A. T. Rakhimov, N. V. Suetin, M. A. Timofeyev, and V. A. Tugarev, Diamond Relat. Mater. 3, 531 (1994).

    Article  ADS  Google Scholar 

  2. J.-K. Lee, K. Y. Eun, Y.-J. Baik, H. J. Cheon, J. W. Rhyu, T. J. Shin, and J.-W. Pack, Diamond Relat. Mater. 11, 463 (2002).

    Article  ADS  Google Scholar 

  3. A. Heiman, I. Gouzman, S. H. Christiansen, H. P. Strunk, and A. Hoffman, Diamond Relat. Mater. 9, 866 (2000).

    Article  ADS  Google Scholar 

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Authors and Affiliations

  1. Institute of High Technology Physics, Tomsk State Polytechnic University, Tomsk, 634050, Russia

    S. A. Linnik & A. V. Gaidaichuk

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  1. S. A. Linnik
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  2. A. V. Gaidaichuk
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Correspondence to S. A. Linnik.

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Original Russian Text © S.A. Linnik, A.V. Gaidaichuk, 2012, published in Pis’ma v Zhurnal Tekhnicheskoi Fiziki, 2012, Vol. 38, No. 6, pp. 9–14.

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Linnik, S.A., Gaidaichuk, A.V. Diamond film synthesis in high-alternating-current glow discharge. Tech. Phys. Lett. 38, 258–260 (2012). https://doi.org/10.1134/S1063785012030273

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  • DOI: https://doi.org/10.1134/S1063785012030273

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