Skip to main content
Log in

On the possibility of electron-beam processing of dielectrics using a forevacuum plasma electron source

  • Published:
Technical Physics Letters Aims and scope Submit manuscript

Abstract

An insulated target was irradiated by an electron beam generated by a forevacuum plasma electron source operating in the pressure range of 5–15 Pa. Measurements of the target potential showed that plasma formed in the region of electron beam transport ensured the almost complete neutralization of charge accumulated on the target. This effect results in the possibility of direct electron-beam processing of nonconducting materials, including the melting and welding of ceramics.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. E. M. Oks, Plasma Cathode Electron Sources: Physics, Technology, Applications (Wiley-VCH, 2006).

  2. Yu. A. Burachevsky, V. A. Burdovitsin, A. S. Klimov, E. M. Oks, and M. V. Fedorov, Zh. Tekh. Fiz. 76(10), 62 (2006) [Tech. Phys. 51, 1316 (2006)].

    Google Scholar 

  3. I. S. Zhirkov, V. A. Burdovitsin, and E. M. Oks, Zh. Tekh. Fiz. 77(9), 115 (2007) [Tech. Phys. 512, 1217 (2007)].

    Google Scholar 

  4. I. S. Zhirkov, V. A. Burdovitsin, E. M. Oks, and I. V. Osipov, Zh. Tekh. Fiz. 76(6), 106 (2006) [Tech. Phys. 51, 786 (2006)].

    Google Scholar 

  5. V. A. Burdovitsin, Yu. A. Burachevskii, E. M. Oks, and M. V. Fedorov, Prib. Tekh. Eksp., No. 2, 127 (2003) [Instr. Exp. Techn. 46, 257 (2003)].

  6. V. Ya. Martens, Zh. Tekh. Fiz. 66(6), 70 (1996) [Tech. Phys. 41, 559 (1996)].

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to V. A. Burdovitsin.

Additional information

Original Russian Text © V.A. Burdovitsin, A.S. Klimov, E.M. Oks, 2009, published in Pis’ma v Zhurnal Tekhnicheskoĭ Fiziki, 2009, Vol. 35, No. 11, pp. 61–66.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Burdovitsin, V.A., Klimov, A.S. & Oks, E.M. On the possibility of electron-beam processing of dielectrics using a forevacuum plasma electron source. Tech. Phys. Lett. 35, 511–513 (2009). https://doi.org/10.1134/S1063785009060091

Download citation

  • Revised:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S1063785009060091

PACS numbers

Navigation