Abstract
A statistical theory of X-ray diffraction on a semiconductor superlattice (SL) with quantum dots (QDs) is developed within the framework of the kinematic approximation. The proposed theory describes in a common approach the coherent and diffuse scattering with allowance for the spatial (vertical and lateral) correlations of QDs. The X-ray diffraction on an SL is numerically modeled taking into account fluctuations in the QD size. It is established that the lateral (short-range) correlations of QDs influence the angular distribution of the scattering intensity. Calculated reciprocal-space maps of the scattering intensity distribution are compared to the experimental patterns.
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Original Russian Text © V.I. Punegov, 2008, published in Pis’ma v Zhurnal Tekhnicheskoĭ Fiziki, 2008, Vol. 34, No. 20, pp. 8–14.