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Obtaining of Smooth High-Precision Surfaces by the Mechanical Lapping Method

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Abstract

We describe in detail a method for obtaining high-precision smooth spherical substrates using mechanical lapping and metrology used for these purposes. We consider a modified version of a two-probe interferometer with a diffraction reference wave, which ensures leveling of the intensities of the arms of the interferometer and rearrangement of the working aperture without instrument resetting. We report on the experimental results obtained during lapping of a concave spherical fused silica substrate using this technique with numerical aperture NA = 0.30, which has been prepared by traditional deep grinding–polishing. The initial characteristics of the substrate are the root-mean-square shape error of 36 nm (~λ/20) and effective roughness σeff = 1.1 nm in the spatial frequency range of 0.025–65 μm–1. After substrate lapping, the surface parameters were improved to a root-mean-square error of 3.3 nm (~ λ/200) and σeff = 0.26 nm. We have analyzed the effect of the grain size in suspension on the roughness and shape of the substrate.

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Funding

This study was performed on the equipment of the Center for Collective Use of the Institute for Physics of Microstructures, Russian Academy of Sciences, and was supported by the Ministry of Education and Science of the Russian Federation under contract no. 075-02-2018-182 (RFMEFI60418X0202).

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Authors and Affiliations

  1. Institute for Physics of Microstructures, Russian Academy of Sciences, 607680, Nizhny Novgorod, Russia

    M. N. Toropov, A. A. Akhsakhalyan, M. V. Zorina, N. N. Salashchenko & N. I. Chkhalo

  2. Moscow Institute of Physics and Technology, 141701, Dolgoprudny, Moscow oblast, Russia

    Yu. M. Tokunov

Authors
  1. M. N. Toropov
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  2. A. A. Akhsakhalyan
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  3. M. V. Zorina
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  4. N. N. Salashchenko
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  5. N. I. Chkhalo
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  6. Yu. M. Tokunov
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Corresponding author

Correspondence to N. I. Chkhalo.

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Translated by N. Wadhwa

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Toropov, M.N., Akhsakhalyan, A.A., Zorina, M.V. et al. Obtaining of Smooth High-Precision Surfaces by the Mechanical Lapping Method. Tech. Phys. 65, 1873–1879 (2020). https://doi.org/10.1134/S1063784220110262

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  • DOI: https://doi.org/10.1134/S1063784220110262

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