Abstract
We propose a method for improving accuracy of nanomechanical measurements by an atomic force microscope. We describe the contact interaction of the cantilever with the sample using an analytic model taking into account different mechanisms of the cantilever probe operation (it can be clamped or can slide over the sample surface), the geometrical and mechanical characteristics of the sample and the cantilever, and their mutual arrangement. For the case of sliding, a filter is developed for correcting signals of contact stiffness and deformation measured on a sample with a developed relief. The application of the filter is illustrated by images obtained with an atomic force microscope in the visualization regime based on point-by-point recording of the forced quasi-static interaction of the cantilever probe with the sample.
Similar content being viewed by others
REFERENCES
D. Sarid, Exploring Scanning Probe Microscopy with MATHEMATICA, 2nd ed. (Wiley, Weinheim, 2007).
A. V. Ankudinov, M. M. Khalisov, V. A. Penniyaynen, S. A. Podzorova, K. I. Timoshchuk, and B. V. Krylov, Tech. Phys. Lett. 44, 671 (2018). https://doi.org/10.1134/S1063785018080035
S. Fujisawa, M. Ohta, T. Konishi, Ya. Sugawara, and S. Morita, Rev. Sci. Instrum. 65 (3), 644 (1994). https://doi.org/10.1063/1.1145131
H. Kawakatsu, H. Bleuler, T. Saito, and K. Hiroshi, Jpn. J. Appl. Phys. 34 (6B), 3400 (1995). https://doi.org/10.1143/JJAP.34.3400
Asylum Research Quantifies the “Last Axis” in Atomic Force Microscopy, https://www.oxford-instruments.com (09.02.2018).
A. V. Ankudinov, Nanosyst.: Phys., Chem., Math. 10 (6), 642 (2019). https://doi.org/10.17586/2220-8054-2019-10-6-642-653
K. I. Timoshchuk, M. M. Khalisov, V. A. Penniyaynen, B. V. Krylov, and A. V. Ankudinov, Tech. Phys. Lett. 45 (9), 947 (2019). https://doi.org/10.1134/S1063785019090293
K. I. Timoshchuk, Candidate’s Dissertation in Mathematics and Physics (ITMO Univ., St. Petersburg, 2019).
A. A. Krasilin, V. N. Nevedomsky, and V. V. Gusarov, J. Phys. Chem. 121 (22), 12495 (2017). https://doi.org/10.1021/acs.jpcc.7b03785
J.-P. Salvetat, A. J. Kulik, J.-M. Bonard, G. A. D. Briggs, T. Stöckli, K. Méténier, S. Bonnamy, F. Béguin, N. A. Burnham, and L. Forró, Adv. Mater. 11, 161 (1999). https://doi.org/10.1002/(SICI)1521-4095(199902)11:2<161::AID-ADMA161>3.0.CO;2-J
A. V. Ankudinov, Semiconductors 53 (14), 1891 (2019). https://doi.org/10.1134/s1063782619140021
Funding
This study was supported by the Russian Science Foundation, project no. 19-13-00151.
Author information
Authors and Affiliations
Corresponding author
Ethics declarations
The authors declare that they have no conflicts of interest.
Additional information
Translated by N. Wadhwa
Rights and permissions
About this article
Cite this article
Ankudinov, A.V., Khalisov, M.M. Contact Stiffness Measurements with an Atomic Force Microscope. Tech. Phys. 65, 1866–1872 (2020). https://doi.org/10.1134/S1063784220110031
Received:
Revised:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S1063784220110031