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Resistivity of Thin Carbon Films with Different sp-Bonds Fractions

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Abstract

Carbon films with different extents of sp hybridization have been grown by ion–plasma pulsed arc sputtering of graphite in a methane atmosphere. Using Raman scattering and transmission electron microscopy data, it has been shown that the content of the phase including carbon chains with sp hybridization grows with increasing methane concentration in the working volume. The resistivity of carbon films correlates well with the fraction of sp-hybridized carbon in the films.

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Funding

This study was supported by the Ministry of Education and Science of the Russian Federation, contract no 14.625.21.0041.

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Authors and Affiliations

  1. Department of Physics, Moscow State University, 119991, Moscow, Russia

    I. A. Zavidovskii, O. A. Streletskii, O. Yu. Nishchak, A. A. Khaidarov & A. V. Pavlikov

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  1. I. A. Zavidovskii
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  2. O. A. Streletskii
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  3. O. Yu. Nishchak
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  4. A. A. Khaidarov
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  5. A. V. Pavlikov
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Correspondence to I. A. Zavidovskii.

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Translated by V. Isaakyan

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Zavidovskii, I.A., Streletskii, O.A., Nishchak, O.Y. et al. Resistivity of Thin Carbon Films with Different sp-Bonds Fractions. Tech. Phys. 65, 139–144 (2020). https://doi.org/10.1134/S1063784220010272

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