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High-Efficiency Electron Source with a Hollow Cathode in Technologies of Thin Film Deposition and Surface Treatment under Forevacuum Pressures

  • Electrophysics, Electron and Ion Beams, Physics of Accelerators
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Abstract

It is shown that low-energy beams with a high efficiency in a wide range of beam currents can be obtained in electron sources with a hollow cathode in the forevacuum pressure range. By varying the geometrical parameters of the electrode system and electromagnetic optics of the electron source, we succeeded in reaching the efficiency at a level of 0.9 for an accelerating potential of 1 kV and beam currents from 100 to 300 mA. The parameters affecting most strongly the efficiency and stability of operation of the electron source with a hollow cathode have been determined.

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Authors and Affiliations

  1. Kutateladze Institute of Thermophysics, Siberian Branch, Russian Academy of Sciences, Novosibirsk, 630090, Russia

    V. G. Shchukin, V. O. Konstantinov & V. S. Morozov

Authors
  1. V. G. Shchukin
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  2. V. O. Konstantinov
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  3. V. S. Morozov
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Corresponding author

Correspondence to V. O. Konstantinov.

Additional information

Original Russian Text © V.G. Shchukin, V.O. Konstantinov, V.S. Morozov, 2018, published in Zhurnal Tekhnicheskoi Fiziki, 2018, Vol. 88, No. 6, pp. 914–919.

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Shchukin, V.G., Konstantinov, V.O. & Morozov, V.S. High-Efficiency Electron Source with a Hollow Cathode in Technologies of Thin Film Deposition and Surface Treatment under Forevacuum Pressures. Tech. Phys. 63, 888–893 (2018). https://doi.org/10.1134/S1063784218060191

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  • DOI: https://doi.org/10.1134/S1063784218060191

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