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Microdetermination of silicon dioxide on the surface by sensors based on perfluorinated proton-conducting membranes

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Abstract

A microdetermination method of silicon dioxide on the silicon surface is studied. In this method, a thin SiO2 layer is dissolved in an aqueous solution of hydrofluoric acid and then the resulting solution is analyzed with sensors based on perfluorinated proton-conducting membranes. Quantitative determination of silicon dioxide remaining on the silicon surface in a quantity as low as 1 × 10−6 mol is demonstrated to be feasible.

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Authors and Affiliations

  1. Ioffe Physical Technical Institute, Russian Academy of Sciences, Politekhnicheskaya ul. 26, St. Petersburg, 194021, Russia

    S. E. Nikitin & E. I. Terukov

  2. OOO Plastpolimer, Polyustrovskii pr. 32, St. Petersburg, 195197, Russia

    S. V. Timofeev

  3. Al-Farabi Kazakh National University, ul. Al-Farabi 71, Alma-Ata, 480078, Kazakhstan

    N. K. Manabaev

Authors
  1. S. E. Nikitin
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  2. E. I. Terukov
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  3. S. V. Timofeev
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  4. N. K. Manabaev
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Corresponding author

Correspondence to S. E. Nikitin.

Additional information

Original Russian Text © S.E. Nikitin, E.I. Terukov, S.V. Timofeev, N.K. Manabaev, 2012, published in Zhurnal Tekhnicheskoi Fiziki, 2012, Vol. 82, No. 6, pp. 132–134.

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Nikitin, S.E., Terukov, E.I., Timofeev, S.V. et al. Microdetermination of silicon dioxide on the surface by sensors based on perfluorinated proton-conducting membranes. Tech. Phys. 57, 865–867 (2012). https://doi.org/10.1134/S1063784212060199

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  • DOI: https://doi.org/10.1134/S1063784212060199

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