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Calculation of the thicknesses and elastic properties of thin-film coatings using atomic-force acoustic microscopy data

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Abstract

The feasibility of applying atomic-force acoustic microscopy to measure the elastic properties of thin-film coatings and their thickness in the range from several to several hundreds of nanometers is studied. In practice, this technique can be used to study diamond-like coatings. The key point of our method is application of “flat” tips, which provide a constant tip-surface contact area and, hence, a constant contact stiffness. The reason for using such tips is that experimental data for thin-film structures gained with standard (rounded) tips cannot be given an adequate quantitative interpretation. Numerical simulation is used to evaluate the thickness and indentation modulus of a coating from contact stiffness k cont measured by atomic-force acoustic microscopy.

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Authors and Affiliations

  1. Moscow Institute of Physics and Technology, Institutskiĭ per. 9, Dolgoprudnyĭ, Moscow oblast, 141700, Russia

    G. S. Batog, A. S. Baturin, V. S. Bormashov & E. P. Sheshin

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  1. G. S. Batog
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  2. A. S. Baturin
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  3. V. S. Bormashov
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  4. E. P. Sheshin
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Additional information

Original Russian Text © G.S. Batog, A.S. Baturin, V.S. Bormashov, E.P. Sheshin, 2006, published in Zhurnal Tekhnicheskoĭ Fiziki, 2006, Vol. 76, No. 8, pp. 123–128.

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Batog, G.S., Baturin, A.S., Bormashov, V.S. et al. Calculation of the thicknesses and elastic properties of thin-film coatings using atomic-force acoustic microscopy data. Tech. Phys. 51, 1084–1089 (2006). https://doi.org/10.1134/S1063784206080196

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  • DOI: https://doi.org/10.1134/S1063784206080196

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