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Photoluminescence Spectra of thin Zno films grown by ALD technology

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Abstract

The photoluminescence of ZnO films grown by atomic layer deposition (ALD) on silicon substrates has been investigated. A new broad photoluminescence band has been revealed in the exciton region of the spectrum. The properties of the band in the spectra of the films with different crystallographic orientations of substrates have been studied in a wide temperature range at different excitation levels. A model describing the origin of the new band has been proposed.

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Authors and Affiliations

  1. St. Petersburg State University, Universitetskaya nab. 7–9, St. Petersburg, 199034, Russia

    I. Kh. Akopyan, M. E. Labzovskaya, A. A. Lisachenko, Ya. A. Mogunov, B. V. Novikov, A. Yu. Serov, V. V. Titov & N. G. Filosofov

  2. Ioffe Physical-Technical Institute, Russian Academy of Sciences, Politekhnicheskaya ul. 26, St. Petersburg, 194021, Russia

    V. Yu. Davydov & A. N. Smirnov

  3. Institute of Chemistry, St. Petersburg State University, Universitetskii pr. 26, Petrodvorets, St. Petersburg, 198504, Russia

    D. V. Nazarov & A. I. Romanychev

Authors
  1. I. Kh. Akopyan
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  2. V. Yu. Davydov
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  3. M. E. Labzovskaya
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  4. A. A. Lisachenko
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  5. Ya. A. Mogunov
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  6. D. V. Nazarov
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  7. B. V. Novikov
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  8. A. I. Romanychev
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  9. A. Yu. Serov
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  10. A. N. Smirnov
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  11. V. V. Titov
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  12. N. G. Filosofov
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Corresponding author

Correspondence to B. V. Novikov.

Additional information

Original Russian Text © I.Kh. Akopyan, V.Yu. Davydov, M.E. Labzovskaya, A.A. Lisachenko, Ya.A. Mogunov, D.V. Nazarov, B.V. Novikov, A.I. Romanychev, A.Yu. Serov, A.N. Smirnov, V.V. Titov, N.G. Filosofov, 2015, published in Fizika Tverdogo Tela, 2015, Vol. 57, No. 9, pp. 1817–1821.

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Akopyan, I.K., Davydov, V.Y., Labzovskaya, M.E. et al. Photoluminescence Spectra of thin Zno films grown by ALD technology. Phys. Solid State 57, 1865–1869 (2015). https://doi.org/10.1134/S1063783415090036

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  • DOI: https://doi.org/10.1134/S1063783415090036

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