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Template Synthesis of Monodisperse Submicrometer Spherical Nanoporous Silicon Particles

  • SEMICONDUCTOR STRUCTURES, LOW-DIMENSIONAL SYSTEMS, AND QUANTUM PHENOMENA
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Abstract

Monodisperse spherical nanoporous silicon (np-Si) particles of submicrometer size are fabricated with mesoporous silica particles as a template. Silicon is synthesized within the mesopores of monodisperse silica particles by the thermal decomposition of monosilane. Then, the template material (a-SiO2) is removed by wet etching. The particles obtained have a small root-mean-square size scatter (no more than 10%) and large specific surface area (250 m2 g–1) and pore volume (0.5 cm3 g–1). It is shown that np-Si particles exhibit photoluminescence in the visible and near-IR (infrared) spectral ranges.

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ACKNOWLEDGMENTS

The TEM study was carried out on equipment of the Federal Collective Use Center “Materials Science and Diagnostics in advanced technologies.”

Funding

The study was carried out with State Budget financing under State assignment no. 0040-2019–0012.

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Authors and Affiliations

  1. Ioffe Institute, 194021, St. Petersburg, Russia

    D. A. Kurdyukov, N. A. Feoktistov, D. A. Kirilenko, A. N. Smirnov, V. Yu. Davydov & V. G. Golubev

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  1. D. A. Kurdyukov
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  2. N. A. Feoktistov
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  3. D. A. Kirilenko
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  4. A. N. Smirnov
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  5. V. Yu. Davydov
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  6. V. G. Golubev
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Correspondence to D. A. Kurdyukov.

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Translated by M. Tagirdzhanov

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Kurdyukov, D.A., Feoktistov, N.A., Kirilenko, D.A. et al. Template Synthesis of Monodisperse Submicrometer Spherical Nanoporous Silicon Particles. Semiconductors 53, 1048–1053 (2019). https://doi.org/10.1134/S106378261908013X

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  • DOI: https://doi.org/10.1134/S106378261908013X

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